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Results 1-25 of 69 (Search time: 0.05 seconds).

TitleAuthor(s)Issue DateViews
 
1991
59
 
Selective chemical etching of InP over InAlAs
Journal:Journal of the Electrochemical Society
1992
97
 
1995
48
 
1996
54
 
Linear microvibromotor for positioning optical components
Journal:Journal of Microelectromechanical Systems
1996
41
 
1996
41
 
Electrothermally actuated bi-directional linear vibromotor
Journal:Microscale Thermophysical Engineering
1999
40
 
Thick polysilicon surface micromachined optically sensed accelerometer
Journal:Proceedings of SPIE - The International Society for Optical Engineering
1999
44
 
2000
42
 
Electrostatic model for an asymmetric combdrive
Journal:Journal of Microelectromechanical Systems
2000
43
 
2000
47
 
On-chip spiral inductors suspended over deep copper-lined cavities
Journal:IEEE Transactions on Microwave Theory and Techniques
2000
50
 
2002
51
 
2002
45
 
2004
62
 
A low-voltage lateral MEMS switch with high RF performance
Journal:Journal of Microelectromechanical Systems
2004
79
 
2004
69
 
2004
68
 
2006
46
 
2007
66
 
2007
75
 
Design, fabrication, and testing of a microfabricated Corona Ionizer
Journal:Journal of Microelectromechanical Systems
2008
67
 
2008
80
 
2009
65
 
2012
148