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Results 1-25 of 98 (Search time: 0.069 seconds).

TitleAuthor(s)Issue DateViews
 
2012
103
 
2012
91
 
Selective chemical etching of InP over InAlAs
Journal:Journal of the Electrochemical Society
1992
89
 
1992
33
 
1995
43
 
Surface-micromachined mirrors for laser-beam positioning
Journal:Sensors and Actuators, A: Physical
1996
52
 
1996
60
 
Linear microvibromotor for positioning optical components
Journal:Journal of Microelectromechanical Systems
1996
39
 
Ultrashort-pulse laser heating of silicon to reduce microstructure adhesion
Journal:International Journal of Heat and Mass Transfer
1996
59
 
1996
50
 
2000
42
Linear microvibromotor for positioning optical components
Proceeding/Conference:Proceedings of the IEEE Micro Electro Mechanical Systems
1995
37
Precision and performance of polysilicon micromirrors for optics
Proceeding/Conference:Proceedings of SPIE - The International Society for Optical Engineering
1995
35
Surface-micromachined mirrors for laser-beam positioning
Proceeding/Conference:International Conference on Solid-State Sensors and Actuators, and Eurosensors IX, Proceedings
1995
39
Actuation of polysilicon surface-micromachined mirrors
Proceeding/Conference:Proceedings of SPIE - The International Society for Optical Engineering
1996
49
 
On-chip spiral inductors suspended over deep copper-lined cavities
Journal:IEEE Transactions on Microwave Theory and Techniques
2000
43
 
2002
56
 
2002
45
 
2004
52
 
2004
52
 
2004
63
 
2001
81
 
2005
60
Multiplexed label-free biosensor chip based on nanoscale electrical double layer capacitance sensing
Proceeding/Conference:Proceedings of the 3rd ASME Integrated Nanosystems Conference - Design, Synthesis, and Applications
2004
49
2004
91