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Results 1-25 of 69 (Search time: 0.071 seconds).

TitleAuthor(s)Issue DateViews
 
1991
73
 
Selective chemical etching of InP over InAlAs
Journal:Journal of the Electrochemical Society
1992
128
 
1995
66
 
1996
81
 
Linear microvibromotor for positioning optical components
Journal:Journal of Microelectromechanical Systems
1996
55
 
1996
67
 
Electrothermally actuated bi-directional linear vibromotor
Journal:Microscale Thermophysical Engineering
1999
52
 
Thick polysilicon surface micromachined optically sensed accelerometer
Journal:Proceedings of SPIE - The International Society for Optical Engineering
1999
53
 
2000
52
 
Electrostatic model for an asymmetric combdrive
Journal:Journal of Microelectromechanical Systems
2000
66
 
2000
59
 
On-chip spiral inductors suspended over deep copper-lined cavities
Journal:IEEE Transactions on Microwave Theory and Techniques
2000
61
 
2002
70
 
2002
56
 
2004
72
 
A low-voltage lateral MEMS switch with high RF performance
Journal:Journal of Microelectromechanical Systems
2004
103
 
2004
93
 
2004
87
 
2006
68
 
2007
91
 
2007
99
 
Design, fabrication, and testing of a microfabricated Corona Ionizer
Journal:Journal of Microelectromechanical Systems
2008
92
 
2008
104
 
2009
86
 
2012
173