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Results 1-25 of 98 (Search time: 0.125 seconds).

TitleAuthor(s)Issue DateViews
 
Selective chemical etching of InP over InAlAs
Journal:Journal of the Electrochemical Society
1992
107
 
1992
50
 
1995
79
 
Surface-micromachined mirrors for laser-beam positioning
Journal:Sensors and Actuators, A: Physical
1996
83
 
1996
92
 
Linear microvibromotor for positioning optical components
Journal:Journal of Microelectromechanical Systems
1996
80
 
Ultrashort-pulse laser heating of silicon to reduce microstructure adhesion
Journal:International Journal of Heat and Mass Transfer
1996
105
 
1996
74
 
2000
67
Linear microvibromotor for positioning optical components
Proceeding/Conference:Proceedings of the IEEE Micro Electro Mechanical Systems
1995
50
Surface-micromachined mirrors for laser-beam positioning
Proceeding/Conference:International Conference on Solid-State Sensors and Actuators, and Eurosensors IX, Proceedings
1995
56
Actuation of polysilicon surface-micromachined mirrors
Proceeding/Conference:Proceedings of SPIE - The International Society for Optical Engineering
1996
68
 
On-chip spiral inductors suspended over deep copper-lined cavities
Journal:IEEE Transactions on Microwave Theory and Techniques
2000
65
 
2002
79
 
2002
64
 
2004
68
 
2004
74
 
2004
92
 
2001
94
 
2005
85
Multiplexed label-free biosensor chip based on nanoscale electrical double layer capacitance sensing
Proceeding/Conference:Proceedings of the 3rd ASME Integrated Nanosystems Conference - Design, Synthesis, and Applications
2004
65
2004
97
Wavelength routing with MEMS switch and a single AWG
Proceeding/Conference:Proceedings of SPIE - The International Society for Optical Engineering
2005
57
Electrical breakdown across micron scale gaps in MEMS structures
Proceeding/Conference:Proceedings of SPIE - The International Society for Optical Engineering
2006
67
3-D MEMS based real-time minimally invasive endoscopic optical coherence tomography
Proceeding/Conference:IEEE/LEOS Optical MEMS 2005: International Conference on Optical MEMS and Their Applications
2005
81