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Article: Low voltage electrothermal vibromotor for silicon optical bench applications

TitleLow voltage electrothermal vibromotor for silicon optical bench applications
Authors
Issue Date2000
PublisherElsevier SA. The Journal's web site is located at http://www.elsevier.com/locate/sna
Citation
Sensors And Actuators, A: Physical, 2000, v. 83 n. 1, p. 237-243 How to Cite?
AbstractThe design and the testing results of a low voltage, compact electrothermal vibromotor (ETV motor) intended for silicon optical bench applications are presented. The surface-micromachined ETV motor consists of a guided movable slider and thermal actuator elements. Actuation occurs with the interaction of vibrating thermal actuators with the slider through coupling by way of impact. Two operation modes, causing forward and backward travel, can be controlled by the input voltage level. The ETV motor is operated with an AC signal at, as low as 5.4 V. A slider traveling speed of 10.2 mm/s is achieved with 12 V square-wave signals at 10.5 kHz. The speed is proportional to the input drive signal frequency. The ETV motor has been operated with the thermal actuator elements driven at frequencies up to 19 kHz. Finally, a hinged vertical micromirror and a rotation stage integrated with the ETV motors are used to demonstrate its capability in the silicon optical bench applications.
Persistent Identifierhttp://hdl.handle.net/10722/148938
ISSN
2015 Impact Factor: 2.201
2015 SCImago Journal Rankings: 0.902
ISI Accession Number ID
References

 

DC FieldValueLanguage
dc.contributor.authorPai, Men_HK
dc.contributor.authorTien, NCen_HK
dc.date.accessioned2012-06-20T06:16:55Z-
dc.date.available2012-06-20T06:16:55Z-
dc.date.issued2000en_HK
dc.identifier.citationSensors And Actuators, A: Physical, 2000, v. 83 n. 1, p. 237-243en_HK
dc.identifier.issn0924-4247en_HK
dc.identifier.urihttp://hdl.handle.net/10722/148938-
dc.description.abstractThe design and the testing results of a low voltage, compact electrothermal vibromotor (ETV motor) intended for silicon optical bench applications are presented. The surface-micromachined ETV motor consists of a guided movable slider and thermal actuator elements. Actuation occurs with the interaction of vibrating thermal actuators with the slider through coupling by way of impact. Two operation modes, causing forward and backward travel, can be controlled by the input voltage level. The ETV motor is operated with an AC signal at, as low as 5.4 V. A slider traveling speed of 10.2 mm/s is achieved with 12 V square-wave signals at 10.5 kHz. The speed is proportional to the input drive signal frequency. The ETV motor has been operated with the thermal actuator elements driven at frequencies up to 19 kHz. Finally, a hinged vertical micromirror and a rotation stage integrated with the ETV motors are used to demonstrate its capability in the silicon optical bench applications.en_HK
dc.languageengen_US
dc.publisherElsevier SA. The Journal's web site is located at http://www.elsevier.com/locate/snaen_HK
dc.relation.ispartofSensors and Actuators, A: Physicalen_HK
dc.titleLow voltage electrothermal vibromotor for silicon optical bench applicationsen_HK
dc.typeArticleen_HK
dc.identifier.emailTien, NC: nctien@hku.hken_HK
dc.identifier.authorityTien, NC=rp01604en_HK
dc.description.naturelink_to_subscribed_fulltexten_US
dc.identifier.doi10.1016/S0924-4247(99)00390-8en_HK
dc.identifier.scopuseid_2-s2.0-0033733840en_HK
dc.relation.referenceshttp://www.scopus.com/mlt/select.url?eid=2-s2.0-0033733840&selection=ref&src=s&origin=recordpageen_HK
dc.identifier.volume83en_HK
dc.identifier.issue1en_HK
dc.identifier.spage237en_HK
dc.identifier.epage243en_HK
dc.identifier.isiWOS:000087144800038-
dc.publisher.placeSwitzerlanden_HK
dc.identifier.scopusauthoridPai, M=7102233717en_HK
dc.identifier.scopusauthoridTien, NC=7006532826en_HK

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