File Download

There are no files associated with this item.

  Links for fulltext
     (May Require Subscription)
Supplementary

Article: Electrostatic model for an asymmetric combdrive

TitleElectrostatic model for an asymmetric combdrive
Authors
Issue Date2000
Citation
Journal Of Microelectromechanical Systems, 2000, v. 9 n. 1, p. 126-135 How to Cite?
AbstractThis paper presents an analytical solution to the electrostatic actuation of an asymmetric combdrive in out-of-plane and torsional motions. The exact solutions to force in the out-of-plane motion and the integral for torque in the torsional motion are obtained. The dependence of the peak force on the thickness of the movable fingers and the amount of overlap of the combs is given in closed form. Using our model, the shift of the natural resonant frequency due to a dc bias is analyzed. Furthermore, our solution also applies to the in-plane motion of an in-plane interdigitated combdrive. We found that an in-plane interdigitated combdrive generates a constant force within 0.1% when the minimum initial engagement length of the combs is twice the separation gap.
Persistent Identifierhttp://hdl.handle.net/10722/148939
ISSN
2015 Impact Factor: 1.939
2015 SCImago Journal Rankings: 0.847
ISI Accession Number ID
References

 

DC FieldValueLanguage
dc.contributor.authorYeh, JLAen_HK
dc.contributor.authorHui, CYen_HK
dc.contributor.authorTien, NCen_HK
dc.date.accessioned2012-06-20T06:16:56Z-
dc.date.available2012-06-20T06:16:56Z-
dc.date.issued2000en_HK
dc.identifier.citationJournal Of Microelectromechanical Systems, 2000, v. 9 n. 1, p. 126-135en_HK
dc.identifier.issn1057-7157en_HK
dc.identifier.urihttp://hdl.handle.net/10722/148939-
dc.description.abstractThis paper presents an analytical solution to the electrostatic actuation of an asymmetric combdrive in out-of-plane and torsional motions. The exact solutions to force in the out-of-plane motion and the integral for torque in the torsional motion are obtained. The dependence of the peak force on the thickness of the movable fingers and the amount of overlap of the combs is given in closed form. Using our model, the shift of the natural resonant frequency due to a dc bias is analyzed. Furthermore, our solution also applies to the in-plane motion of an in-plane interdigitated combdrive. We found that an in-plane interdigitated combdrive generates a constant force within 0.1% when the minimum initial engagement length of the combs is twice the separation gap.en_HK
dc.languageengen_US
dc.relation.ispartofJournal of Microelectromechanical Systemsen_HK
dc.titleElectrostatic model for an asymmetric combdriveen_HK
dc.typeArticleen_HK
dc.identifier.emailTien, NC: nctien@hku.hken_HK
dc.identifier.authorityTien, NC=rp01604en_HK
dc.description.naturelink_to_subscribed_fulltexten_US
dc.identifier.doi10.1109/84.825787en_HK
dc.identifier.scopuseid_2-s2.0-0033897204en_HK
dc.relation.referenceshttp://www.scopus.com/mlt/select.url?eid=2-s2.0-0033897204&selection=ref&src=s&origin=recordpageen_HK
dc.identifier.volume9en_HK
dc.identifier.issue1en_HK
dc.identifier.spage126en_HK
dc.identifier.epage135en_HK
dc.identifier.isiWOS:000085857600018-
dc.publisher.placeUnited Statesen_HK
dc.identifier.scopusauthoridYeh, JLA=7201895883en_HK
dc.identifier.scopusauthoridHui, CY=7202876972en_HK
dc.identifier.scopusauthoridTien, NC=7006532826en_HK

Export via OAI-PMH Interface in XML Formats


OR


Export to Other Non-XML Formats