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Article: Force based displacement measurement in micromechanical devices

TitleForce based displacement measurement in micromechanical devices
Authors
O'Shea, SJNg, CKTan, YYXu, YTay, EHChua, BLTien, NCTang, XSChen, WT
Issue Date2001
PublisherAmerican Institute of Physics. The Journal's web site is located at http://apl.aip.org/
Citation
Applied Physics Letters, 2001, v. 78 n. 25, p. 4031-4033 How to Cite?
DOI: http://dx.doi.org/10.1063/1.1380398
AbstractWe demonstrate how force detection methods based on atomic force microscopy can be used to measure displacement in micromechanical devices. We show the operation of a simple microfabricated accelerometer, the proof mass of which incorporates a tip which can be moved towards an opposing surface. Both noncontact operation using long range electrostatic forces and tapping mode operation are demonstrated. The displacement sensitivity of the present device using feedback to control the tip-surface separation is approximately 1 nm. © 2001 American Institute of Physics.
Persistent Identifierhttp://hdl.handle.net/10722/148949
ISSN
0003-6951
2021 Impact Factor: 3.971
2020 SCImago Journal Rankings: 1.182
ISI Accession Number ID
WOS:000169339800036
References
References in Scopus

 

DC FieldValueLanguage
dc.contributor.authorO'Shea, SJen_HK
dc.contributor.authorNg, CKen_HK
dc.contributor.authorTan, YYen_HK
dc.contributor.authorXu, Yen_HK
dc.contributor.authorTay, EHen_HK
dc.contributor.authorChua, BLen_HK
dc.contributor.authorTien, NCen_HK
dc.contributor.authorTang, XSen_HK
dc.contributor.authorChen, WTen_HK
dc.date.accessioned2012-06-20T06:17:00Z-
dc.date.available2012-06-20T06:17:00Z-
dc.date.issued2001en_HK
dc.identifier.citationApplied Physics Letters, 2001, v. 78 n. 25, p. 4031-4033-
dc.identifier.issn0003-6951en_HK
dc.identifier.urihttp://hdl.handle.net/10722/148949-
dc.description.abstractWe demonstrate how force detection methods based on atomic force microscopy can be used to measure displacement in micromechanical devices. We show the operation of a simple microfabricated accelerometer, the proof mass of which incorporates a tip which can be moved towards an opposing surface. Both noncontact operation using long range electrostatic forces and tapping mode operation are demonstrated. The displacement sensitivity of the present device using feedback to control the tip-surface separation is approximately 1 nm. © 2001 American Institute of Physics.en_HK
dc.languageengen_US
dc.publisherAmerican Institute of Physics. The Journal's web site is located at http://apl.aip.org/en_HK
dc.relation.ispartofApplied Physics Lettersen_HK
dc.titleForce based displacement measurement in micromechanical devicesen_HK
dc.typeArticleen_HK
dc.identifier.emailTien, NC: nctien@hku.hken_HK
dc.identifier.authorityTien, NC=rp01604en_HK
dc.description.naturelink_to_subscribed_fulltexten_US
dc.identifier.doi10.1063/1.1380398en_HK
dc.identifier.scopuseid_2-s2.0-17844395442en_HK
dc.relation.referenceshttp://www.scopus.com/mlt/select.url?eid=2-s2.0-17844395442&selection=ref&src=s&origin=recordpageen_HK
dc.identifier.volume78en_HK
dc.identifier.issue25en_HK
dc.identifier.spage4031en_HK
dc.identifier.epage4033en_HK
dc.identifier.isiWOS:000169339800036-
dc.publisher.placeUnited Statesen_HK
dc.identifier.scopusauthoridO'Shea, SJ=7006596987en_HK
dc.identifier.scopusauthoridNg, CK=7401705606en_HK
dc.identifier.scopusauthoridTan, YY=8930738500en_HK
dc.identifier.scopusauthoridXu, Y=7406452606en_HK
dc.identifier.scopusauthoridTay, EH=7004902861en_HK
dc.identifier.scopusauthoridChua, BL=36973839300en_HK
dc.identifier.scopusauthoridTien, NC=7006532826en_HK
dc.identifier.scopusauthoridTang, XS=7404101531en_HK
dc.identifier.scopusauthoridChen, WT=7409643518en_HK
dc.identifier.issnl0003-6951-

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