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Results 1-25 of 98 (Search time: 0.03 seconds).

TitleAuthor(s)Issue DateViews
 
Surface-micromachined mirrors for laser-beam positioning
Journal:Sensors and Actuators, A: Physical
1996
111
A three dimensional real-time MEMS based optical biopsy system for in-vivo clinical imaging
Proceeding/Conference:TRANSDUCERS and EUROSENSORS '07 - 4th International Conference on Solid-State Sensors, Actuators and Microsystems
2007
124
Nanoscale Al-Al and Cu-Cu contacts
Proceeding/Conference:TRANSDUCERS and EUROSENSORS '07 - 4th International Conference on Solid-State Sensors, Actuators and Microsystems
2007
102
2010
100
A process research for integrated RF tunable filter
Proceeding/Conference:Proceedings of 1st IEEE International Conference on Nano Micro Engineered and Molecular Systems, 1st IEEE-NEMS
2006
97
 
Linear microvibromotor for positioning optical components
Journal:Journal of Microelectromechanical Systems
1996
140
Linear microvibromotor for positioning optical components
Proceeding/Conference:Proceedings of the IEEE Micro Electro Mechanical Systems
1995
97
 
1996
171
Optimized and microfabricated ionic wind pump array as a next generation solution for electronics cooling systems
Proceeding/Conference:InterSociety Conference on Thermal and Thermomechanical Phenomena in Electronic Systems, ITHERM
2012
49
 
1995
192
 
2002
108
The future of MEMS in energy technologies
Proceeding/Conference:International Conference on Solid-State and Integrated Circuits Technology Proceedings, ICSICT
2008
119
 
1992
97
 
2004
166
2014
57
 
2004
107
 
2001
128
Electromagnetically shielded high-Q CMOS-compatible copper inductors
Proceeding/Conference:Digest of Technical Papers - IEEE International Solid-State Circuits Conference
2000
71
Surface-micromachined mirrors for laser-beam positioning
Proceeding/Conference:International Conference on Solid-State Sensors and Actuators, and Eurosensors IX, Proceedings
1995
106
2004
165
Modeling and measurement of microfabricated corona discharge structures
Proceeding/Conference:3rd IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS
2008
106
 
2002
164
 
2007
178
Micro-optical inertial sensors using silicon MEMS
Proceeding/Conference:IEEE Aerospace Applications Conference Proceedings
1998
96
 
1999
158