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Article: Surface-micromachined mirrors for laser-beam positioning

TitleSurface-micromachined mirrors for laser-beam positioning
Authors
KeywordsActuated micromirrors
Comb-drive microactuators
Microphotonics
Polysilicon hinges
Scanning micromirrors
Issue Date1996
PublisherElsevier SA. The Journal's web site is located at http://www.elsevier.com/locate/sna
Citation
Sensors And Actuators, A: Physical, 1996, v. 52 n. 1-3, p. 76-80 How to Cite?
AbstractActuated surface-micromachined polysilicon micromirrors for laser-beam positioning have been designed and fabricated. Two types of beam-steering mirrors are discussed which use microhinge technology to achieve the required vertical dimensions and functionality. One mirror, intended for precise beam positioning as needed in optical alignment, is actuated by linear microvibromotors. The other mirror is appropriate for laser-beam scanning and uses electrostatic comb-drive actuators. Four layers of polycrystalline silicon are micromachined to form these devices. Environmental stress testing carried out on the beam-positioning mirror has shown its structure to be relatively insensitive to vibrations below 60 kHz. Further testing has shown negligible changes in mirror position for temperatures varying between 25 and 200°C, and stability under the stress of laser irradiation of 375 mW at 1.06 μm wavelength.
Persistent Identifierhttp://hdl.handle.net/10722/148928
ISSN
2015 Impact Factor: 2.201
2015 SCImago Journal Rankings: 0.902
References

 

DC FieldValueLanguage
dc.contributor.authorTien, NCen_HK
dc.contributor.authorSolgaard, Oen_HK
dc.contributor.authorKiang, MHen_HK
dc.contributor.authorDaneman, MJen_HK
dc.contributor.authorLau, KYen_HK
dc.contributor.authorMuller, RSen_HK
dc.date.accessioned2012-06-20T06:16:52Z-
dc.date.available2012-06-20T06:16:52Z-
dc.date.issued1996en_HK
dc.identifier.citationSensors And Actuators, A: Physical, 1996, v. 52 n. 1-3, p. 76-80en_HK
dc.identifier.issn0924-4247en_HK
dc.identifier.urihttp://hdl.handle.net/10722/148928-
dc.description.abstractActuated surface-micromachined polysilicon micromirrors for laser-beam positioning have been designed and fabricated. Two types of beam-steering mirrors are discussed which use microhinge technology to achieve the required vertical dimensions and functionality. One mirror, intended for precise beam positioning as needed in optical alignment, is actuated by linear microvibromotors. The other mirror is appropriate for laser-beam scanning and uses electrostatic comb-drive actuators. Four layers of polycrystalline silicon are micromachined to form these devices. Environmental stress testing carried out on the beam-positioning mirror has shown its structure to be relatively insensitive to vibrations below 60 kHz. Further testing has shown negligible changes in mirror position for temperatures varying between 25 and 200°C, and stability under the stress of laser irradiation of 375 mW at 1.06 μm wavelength.en_HK
dc.languageengen_US
dc.publisherElsevier SA. The Journal's web site is located at http://www.elsevier.com/locate/snaen_HK
dc.relation.ispartofSensors and Actuators, A: Physicalen_HK
dc.subjectActuated micromirrorsen_HK
dc.subjectComb-drive microactuatorsen_HK
dc.subjectMicrophotonicsen_HK
dc.subjectPolysilicon hingesen_HK
dc.subjectScanning micromirrorsen_HK
dc.titleSurface-micromachined mirrors for laser-beam positioningen_HK
dc.typeArticleen_HK
dc.identifier.emailTien, NC: nctien@hku.hken_HK
dc.identifier.authorityTien, NC=rp01604en_HK
dc.description.naturelink_to_subscribed_fulltexten_US
dc.identifier.scopuseid_2-s2.0-0030100426en_HK
dc.relation.referenceshttp://www.scopus.com/mlt/select.url?eid=2-s2.0-0030100426&selection=ref&src=s&origin=recordpageen_HK
dc.identifier.volume52en_HK
dc.identifier.issue1-3en_HK
dc.identifier.spage76en_HK
dc.identifier.epage80en_HK
dc.publisher.placeSwitzerlanden_HK
dc.identifier.scopusauthoridTien, NC=7006532826en_HK
dc.identifier.scopusauthoridSolgaard, O=7005609097en_HK
dc.identifier.scopusauthoridKiang, MH=7003422357en_HK
dc.identifier.scopusauthoridDaneman, MJ=7003552202en_HK
dc.identifier.scopusauthoridLau, KY=7401559989en_HK
dc.identifier.scopusauthoridMuller, RS=7404245946en_HK

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