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Conference Paper: Linear microvibromotor for positioning optical components

TitleLinear microvibromotor for positioning optical components
Authors
Daneman, MJTien, NCSolgaard, OPisano, APLau, KYMuller, RS
Issue Date1995
Citation
Proceedings Of The Ieee Micro Electro Mechanical Systems, 1995, p. 55-60 How to Cite?
AbstractWe report an electrostatically driven linear microvibromotor fabricated using surface-micromachining technology. The vibromotor has submicron positioning resolution and a travel range exceeding 100 μm. This device is characterized and a simple simulation of its dynamics is presented.
Persistent Identifierhttp://hdl.handle.net/10722/148988

 

DC FieldValueLanguage
dc.contributor.authorDaneman, MJen_HK
dc.contributor.authorTien, NCen_HK
dc.contributor.authorSolgaard, Oen_HK
dc.contributor.authorPisano, APen_HK
dc.contributor.authorLau, KYen_HK
dc.contributor.authorMuller, RSen_HK
dc.date.accessioned2012-06-20T06:17:42Z-
dc.date.available2012-06-20T06:17:42Z-
dc.date.issued1995en_HK
dc.identifier.citationProceedings Of The Ieee Micro Electro Mechanical Systems, 1995, p. 55-60en_US
dc.identifier.urihttp://hdl.handle.net/10722/148988-
dc.description.abstractWe report an electrostatically driven linear microvibromotor fabricated using surface-micromachining technology. The vibromotor has submicron positioning resolution and a travel range exceeding 100 μm. This device is characterized and a simple simulation of its dynamics is presented.en_HK
dc.languageengen_US
dc.relation.ispartofProceedings of the IEEE Micro Electro Mechanical Systemsen_HK
dc.titleLinear microvibromotor for positioning optical componentsen_HK
dc.typeConference_Paperen_HK
dc.identifier.emailTien, NC: nctien@hku.hken_HK
dc.identifier.authorityTien, NC=rp01604en_HK
dc.description.naturelink_to_subscribed_fulltexten_US
dc.identifier.scopuseid_2-s2.0-0029179039en_HK
dc.identifier.spage55en_HK
dc.identifier.epage60en_HK
dc.identifier.scopusauthoridDaneman, MJ=7003552202en_HK
dc.identifier.scopusauthoridTien, NC=7006532826en_HK
dc.identifier.scopusauthoridSolgaard, O=7005609097en_HK
dc.identifier.scopusauthoridPisano, AP=7103194270en_HK
dc.identifier.scopusauthoridLau, KY=7401559989en_HK
dc.identifier.scopusauthoridMuller, RS=7404245946en_HK

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