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Conference Paper: Micro-optical inertial sensors using silicon MEMS
Title | Micro-optical inertial sensors using silicon MEMS |
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Authors | |
Issue Date | 1998 |
Citation | Ieee Aerospace Applications Conference Proceedings, 1998, v. 1, p. 437-443 How to Cite? |
Abstract | Polysilicon surface-micromachining offers a new approach to the development of micro-optical systems on silicon. An `optical bench on a chip' with multiple three-dimensional components that are movable has been developed. An accelerometer, which relies on the measurement of optical intensity change due to the interaction between a light beam and a movable optical filter has been fabricated. The filter consists of a aluminum-coated polysilicon grating that is connected to folded-beam springs that are anchored on the substrate. A 0.5 micron movement of the mass-spring system translated to 150 g acceleration. Simulation of the vibration modes of the mechanical structure indicate that the first natural frequency would occur at 6.9 kHz. A new accelerometer has been designed that can sense 10 g with a 1 micron movement of the filter. Optical interferometric sensors have also been fabricated. These can be also be used in high precision accelerometers. Multi-axis accelerometers can be easily developed in these silicon micro-optical systems. |
Persistent Identifier | http://hdl.handle.net/10722/148992 |
DC Field | Value | Language |
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dc.contributor.author | Tien, Norman C | en_HK |
dc.date.accessioned | 2012-06-20T06:17:44Z | - |
dc.date.available | 2012-06-20T06:17:44Z | - |
dc.date.issued | 1998 | en_HK |
dc.identifier.citation | Ieee Aerospace Applications Conference Proceedings, 1998, v. 1, p. 437-443 | en_US |
dc.identifier.uri | http://hdl.handle.net/10722/148992 | - |
dc.description.abstract | Polysilicon surface-micromachining offers a new approach to the development of micro-optical systems on silicon. An `optical bench on a chip' with multiple three-dimensional components that are movable has been developed. An accelerometer, which relies on the measurement of optical intensity change due to the interaction between a light beam and a movable optical filter has been fabricated. The filter consists of a aluminum-coated polysilicon grating that is connected to folded-beam springs that are anchored on the substrate. A 0.5 micron movement of the mass-spring system translated to 150 g acceleration. Simulation of the vibration modes of the mechanical structure indicate that the first natural frequency would occur at 6.9 kHz. A new accelerometer has been designed that can sense 10 g with a 1 micron movement of the filter. Optical interferometric sensors have also been fabricated. These can be also be used in high precision accelerometers. Multi-axis accelerometers can be easily developed in these silicon micro-optical systems. | en_HK |
dc.language | eng | en_US |
dc.relation.ispartof | IEEE Aerospace Applications Conference Proceedings | en_HK |
dc.title | Micro-optical inertial sensors using silicon MEMS | en_HK |
dc.type | Conference_Paper | en_HK |
dc.identifier.email | Tien, Norman C: nctien@hku.hk | en_HK |
dc.identifier.authority | Tien, Norman C=rp01604 | en_HK |
dc.description.nature | link_to_subscribed_fulltext | en_US |
dc.identifier.scopus | eid_2-s2.0-0031633307 | en_HK |
dc.identifier.volume | 1 | en_HK |
dc.identifier.spage | 437 | en_HK |
dc.identifier.epage | 443 | en_HK |
dc.identifier.scopusauthorid | Tien, Norman C=7006532826 | en_HK |