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- Publisher Website: 10.1109/NEMS.2006.334786
- Scopus: eid_2-s2.0-46149092249
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Conference Paper: A process research for integrated RF tunable filter
Title | A process research for integrated RF tunable filter |
---|---|
Authors | |
Keywords | Integration MEMS fabrication RF Tunable filter Wireless net work |
Issue Date | 2006 |
Citation | Proceedings Of 1St Ieee International Conference On Nano Micro Engineered And Molecular Systems, 1St Ieee-Nems, 2006, p. 1449-1452 How to Cite? |
Abstract | Due to the research work has been done in RF MEMS fields for more than 10 years, RF lumped elements, like inductor, tunable capacitor, CPW line and switch, are developed very well, and studied deeply. But for its wireless application, integrated tunable RF net work, which composed by these lumped elements are much more important and useful, especially in high and medium Frequency system, high performance and low lost low-pass, band-pass filter, impedance match net work have widen application, especially, RF tunable filters will be a big benefit for the system. In this paper, we put forward our effort in fabrication research in such an integrate tunable filters, applying glass substrate for RF inductor, CPW line and MIM capacitors, using anodic bonding to integrate glass and silicon wafer, and then fabrication bulk structure of tunable capacitor and switch by DRIE, to be a tunable system. This process gives capability to make different tunable RF net work in GHz wireless system. ©2006 IEEE. |
Persistent Identifier | http://hdl.handle.net/10722/149021 |
References |
DC Field | Value | Language |
---|---|---|
dc.contributor.author | Zhang, H | en_HK |
dc.contributor.author | Li, M | en_HK |
dc.contributor.author | Zhang, D | en_HK |
dc.contributor.author | Tien, NC | en_HK |
dc.date.accessioned | 2012-06-20T06:17:55Z | - |
dc.date.available | 2012-06-20T06:17:55Z | - |
dc.date.issued | 2006 | en_HK |
dc.identifier.citation | Proceedings Of 1St Ieee International Conference On Nano Micro Engineered And Molecular Systems, 1St Ieee-Nems, 2006, p. 1449-1452 | en_US |
dc.identifier.uri | http://hdl.handle.net/10722/149021 | - |
dc.description.abstract | Due to the research work has been done in RF MEMS fields for more than 10 years, RF lumped elements, like inductor, tunable capacitor, CPW line and switch, are developed very well, and studied deeply. But for its wireless application, integrated tunable RF net work, which composed by these lumped elements are much more important and useful, especially in high and medium Frequency system, high performance and low lost low-pass, band-pass filter, impedance match net work have widen application, especially, RF tunable filters will be a big benefit for the system. In this paper, we put forward our effort in fabrication research in such an integrate tunable filters, applying glass substrate for RF inductor, CPW line and MIM capacitors, using anodic bonding to integrate glass and silicon wafer, and then fabrication bulk structure of tunable capacitor and switch by DRIE, to be a tunable system. This process gives capability to make different tunable RF net work in GHz wireless system. ©2006 IEEE. | en_HK |
dc.language | eng | en_US |
dc.relation.ispartof | Proceedings of 1st IEEE International Conference on Nano Micro Engineered and Molecular Systems, 1st IEEE-NEMS | en_HK |
dc.subject | Integration | en_HK |
dc.subject | MEMS fabrication | en_HK |
dc.subject | RF Tunable filter | en_HK |
dc.subject | Wireless net work | en_HK |
dc.title | A process research for integrated RF tunable filter | en_HK |
dc.type | Conference_Paper | en_HK |
dc.identifier.email | Tien, NC: nctien@hku.hk | en_HK |
dc.identifier.authority | Tien, NC=rp01604 | en_HK |
dc.description.nature | link_to_subscribed_fulltext | en_US |
dc.identifier.doi | 10.1109/NEMS.2006.334786 | en_HK |
dc.identifier.scopus | eid_2-s2.0-46149092249 | en_HK |
dc.relation.references | http://www.scopus.com/mlt/select.url?eid=2-s2.0-46149092249&selection=ref&src=s&origin=recordpage | en_HK |
dc.identifier.spage | 1449 | en_HK |
dc.identifier.epage | 1452 | en_HK |
dc.identifier.scopusauthorid | Zhang, H=8347119800 | en_HK |
dc.identifier.scopusauthorid | Li, M=36062846100 | en_HK |
dc.identifier.scopusauthorid | Zhang, D=7405359351 | en_HK |
dc.identifier.scopusauthorid | Tien, NC=7006532826 | en_HK |