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Article: Integrated polysilicon and DRIE bulk silicon micromachining for an electrostatic torsional actuator
Title | Integrated polysilicon and DRIE bulk silicon micromachining for an electrostatic torsional actuator |
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Authors | |
Issue Date | 1999 |
Citation | Journal Of Microelectromechanical Systems, 1999, v. 8 n. 4, p. 456-465 How to Cite? |
Abstract | This paper presents a fabrication process that integrates polysilicon surface micromachining and deep reactive ion etching (DRIE) bulk silicon micromachining. The process takes advantage of the design flexibility of polysilicon surface micromachining and the deep silicon structures possible with DRIE. As a demonstration, a torsional actuator driven by a combdrive moving in the out-of-plane direction, consisting of polysilicon fingers and bulk silicon fingers, has been fabricated. The integrated process allows the combdrive to be integrated with any structure made by polysilicon surface micromachining. |
Persistent Identifier | http://hdl.handle.net/10722/148934 |
ISSN | 2021 Impact Factor: 2.829 2020 SCImago Journal Rankings: 0.596 |
ISI Accession Number ID | |
References |
DC Field | Value | Language |
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dc.contributor.author | Yeh, JLA | en_HK |
dc.contributor.author | Jiang, H | en_HK |
dc.contributor.author | Tien, NC | en_HK |
dc.date.accessioned | 2012-06-20T06:16:54Z | - |
dc.date.available | 2012-06-20T06:16:54Z | - |
dc.date.issued | 1999 | en_HK |
dc.identifier.citation | Journal Of Microelectromechanical Systems, 1999, v. 8 n. 4, p. 456-465 | en_HK |
dc.identifier.issn | 1057-7157 | en_HK |
dc.identifier.uri | http://hdl.handle.net/10722/148934 | - |
dc.description.abstract | This paper presents a fabrication process that integrates polysilicon surface micromachining and deep reactive ion etching (DRIE) bulk silicon micromachining. The process takes advantage of the design flexibility of polysilicon surface micromachining and the deep silicon structures possible with DRIE. As a demonstration, a torsional actuator driven by a combdrive moving in the out-of-plane direction, consisting of polysilicon fingers and bulk silicon fingers, has been fabricated. The integrated process allows the combdrive to be integrated with any structure made by polysilicon surface micromachining. | en_HK |
dc.language | eng | en_US |
dc.relation.ispartof | Journal of Microelectromechanical Systems | en_HK |
dc.title | Integrated polysilicon and DRIE bulk silicon micromachining for an electrostatic torsional actuator | en_HK |
dc.type | Article | en_HK |
dc.identifier.email | Tien, NC: nctien@hku.hk | en_HK |
dc.identifier.authority | Tien, NC=rp01604 | en_HK |
dc.description.nature | link_to_subscribed_fulltext | en_US |
dc.identifier.doi | 10.1109/84.809061 | en_HK |
dc.identifier.scopus | eid_2-s2.0-0033338025 | en_HK |
dc.relation.references | http://www.scopus.com/mlt/select.url?eid=2-s2.0-0033338025&selection=ref&src=s&origin=recordpage | en_HK |
dc.identifier.volume | 8 | en_HK |
dc.identifier.issue | 4 | en_HK |
dc.identifier.spage | 456 | en_HK |
dc.identifier.epage | 465 | en_HK |
dc.identifier.isi | WOS:000084225400014 | - |
dc.publisher.place | United States | en_HK |
dc.identifier.scopusauthorid | Yeh, JLA=7201895883 | en_HK |
dc.identifier.scopusauthorid | Jiang, H=36120322000 | en_HK |
dc.identifier.scopusauthorid | Tien, NC=7006532826 | en_HK |
dc.identifier.issnl | 1057-7157 | - |