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Article: Integrated polysilicon and DRIE bulk silicon micromachining for an electrostatic torsional actuator

TitleIntegrated polysilicon and DRIE bulk silicon micromachining for an electrostatic torsional actuator
Authors
Issue Date1999
Citation
Journal Of Microelectromechanical Systems, 1999, v. 8 n. 4, p. 456-465 How to Cite?
AbstractThis paper presents a fabrication process that integrates polysilicon surface micromachining and deep reactive ion etching (DRIE) bulk silicon micromachining. The process takes advantage of the design flexibility of polysilicon surface micromachining and the deep silicon structures possible with DRIE. As a demonstration, a torsional actuator driven by a combdrive moving in the out-of-plane direction, consisting of polysilicon fingers and bulk silicon fingers, has been fabricated. The integrated process allows the combdrive to be integrated with any structure made by polysilicon surface micromachining.
Persistent Identifierhttp://hdl.handle.net/10722/148934
ISSN
2015 Impact Factor: 1.939
2015 SCImago Journal Rankings: 0.847
ISI Accession Number ID
References

 

DC FieldValueLanguage
dc.contributor.authorYeh, JLAen_HK
dc.contributor.authorJiang, Hen_HK
dc.contributor.authorTien, NCen_HK
dc.date.accessioned2012-06-20T06:16:54Z-
dc.date.available2012-06-20T06:16:54Z-
dc.date.issued1999en_HK
dc.identifier.citationJournal Of Microelectromechanical Systems, 1999, v. 8 n. 4, p. 456-465en_HK
dc.identifier.issn1057-7157en_HK
dc.identifier.urihttp://hdl.handle.net/10722/148934-
dc.description.abstractThis paper presents a fabrication process that integrates polysilicon surface micromachining and deep reactive ion etching (DRIE) bulk silicon micromachining. The process takes advantage of the design flexibility of polysilicon surface micromachining and the deep silicon structures possible with DRIE. As a demonstration, a torsional actuator driven by a combdrive moving in the out-of-plane direction, consisting of polysilicon fingers and bulk silicon fingers, has been fabricated. The integrated process allows the combdrive to be integrated with any structure made by polysilicon surface micromachining.en_HK
dc.languageengen_US
dc.relation.ispartofJournal of Microelectromechanical Systemsen_HK
dc.titleIntegrated polysilicon and DRIE bulk silicon micromachining for an electrostatic torsional actuatoren_HK
dc.typeArticleen_HK
dc.identifier.emailTien, NC: nctien@hku.hken_HK
dc.identifier.authorityTien, NC=rp01604en_HK
dc.description.naturelink_to_subscribed_fulltexten_US
dc.identifier.doi10.1109/84.809061en_HK
dc.identifier.scopuseid_2-s2.0-0033338025en_HK
dc.relation.referenceshttp://www.scopus.com/mlt/select.url?eid=2-s2.0-0033338025&selection=ref&src=s&origin=recordpageen_HK
dc.identifier.volume8en_HK
dc.identifier.issue4en_HK
dc.identifier.spage456en_HK
dc.identifier.epage465en_HK
dc.identifier.isiWOS:000084225400014-
dc.publisher.placeUnited Statesen_HK
dc.identifier.scopusauthoridYeh, JLA=7201895883en_HK
dc.identifier.scopusauthoridJiang, H=36120322000en_HK
dc.identifier.scopusauthoridTien, NC=7006532826en_HK

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