Browsing by Author rp01604

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TitleAuthor(s)Issue Date
Nanoscale Al-Al and Cu-Cu contacts
Proceeding/Conference:TRANSDUCERS and EUROSENSORS '07 - 4th International Conference on Solid-State Sensors, Actuators and Microsystems
2007
New fabrication method for high-Q on-chip spiral inductor
Proceeding/Conference:Proceedings of SPIE - The International Society for Optical Engineering
1999
 
On-chip spiral inductors suspended over deep copper-lined cavities
Journal:IEEE Transactions on Microwave Theory and Techniques
2000
Operating principles of an electrothermal vibrometer for optical switching applications
Proceeding/Conference:Proceedings of SPIE - The International Society for Optical Engineering
1999
Optical coherence tomography based on high-speed scanning MEMS mirror
Proceeding/Conference:Progress in Biomedical Optics and Imaging - Proceedings of SPIE
2005
Optimized and microfabricated ionic wind pump array as a next generation solution for electronics cooling systems
Proceeding/Conference:InterSociety Conference on Thermal and Thermomechanical Phenomena in Electronic Systems, ITHERM
2012
Optimized ionic wind-based cooling microfabricated devices for improving a measured coefficient of performance
Proceeding/Conference:ASME/JSME 2011 8th Thermal Engineering Joint Conference, AJTEC 2011
2011
 
1995
A PDMS interstitial fluid transdermal extraction tool
Proceeding/Conference:2010 IEEE 5th International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2010
2010
 
2004
Precision and performance of polysilicon micromirrors for hybrid integrated optics
Proceeding/Conference:Proceedings of SPIE - The International Society for Optical Engineering
1995
A process research for integrated RF tunable filter
Proceeding/Conference:Proceedings of 1st IEEE International Conference on Nano Micro Engineered and Molecular Systems, 1st IEEE-NEMS
2006
Reconfigurable hardware mapping for accelerometer-based navigation applications
Proceeding/Conference:Proceedings of SPIE - The International Society for Optical Engineering
1998
Reducing silicon-substrate parasitics of on-chip transformers
Proceeding/Conference:Proceedings of the IEEE Micro Electro Mechanical Systems (MEMS)
2002
 
Selective chemical etching of InP over InAlAs
Journal:Journal of the Electrochemical Society
1992
Silicon carbide (SiC) membrane nanomechanical resonators with multiple vibrational modes
Proceeding/Conference:2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11
2011
 
Silicon micromachined thermal sensors and actuators
Journal:Microscale Thermophysical Engineering
1997
 
1989
 
1996
Surface-micromachined mirrors for laser-beam positioning
Proceeding/Conference:International Conference on Solid-State Sensors and Actuators, and Eurosensors IX, Proceedings
1995