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Conference Paper: Precision and performance of polysilicon micromirrors for optics

TitlePrecision and performance of polysilicon micromirrors for optics
Authors
Issue Date1995
PublisherS P I E - International Society for Optical Engineering. The Journal's web site is located at http://spie.org/x1848.xml
Citation
Proceedings Of Spie - The International Society For Optical Engineering, 1995, v. 2383, p. 99-109 How to Cite?
AbstractWe have designed and built integrated, movable micromirrors for on-chip alignment in silicon-optical-bench technology. The mirrors are fabricated using surface micromachining with three polysilicon layers. A polysilicon-hinge technology was used to achieve the required vertical dimensions and functionality for alignment in hybrid photonic integrated circuits. The positioning accuracy of the mirrors is measured to be on the order of 0.2 μm. This precision is shown theoretically and experimentally to be sufficient for laser-to-fiber coupling. In the experimental verification, we used external actuators to position the micromirror and obtained 45% coupling efficiency from a semiconductor laser (operating at 1.3 μm) to a standard single-mode optical fiber. The stability and robustness of the micromirrors were demonstrated in shock and vibration tests that showed that the micromirrors will withstand normal handling and operation without the need for welding or gluing. This micromirror technology combines the low-cost advantage of passive alignment and the accuracy of active alignment. In addition to optoelectronic packaging, the micromirrors can be expected to find applications in grating-tuned external-cavity lasers, scanning lasers, and interferometers.
Persistent Identifierhttp://hdl.handle.net/10722/148989
ISSN

 

DC FieldValueLanguage
dc.contributor.authorSolgaard, Olaven_HK
dc.contributor.authorTien, Norman Cen_HK
dc.contributor.authorDaneman, Michaelen_HK
dc.contributor.authorKiang, MengHsiungen_HK
dc.contributor.authorFriedberger, Aloisen_HK
dc.contributor.authorMuller, Richard Sen_HK
dc.contributor.authorLau, Kam Yen_HK
dc.date.accessioned2012-06-20T06:17:43Z-
dc.date.available2012-06-20T06:17:43Z-
dc.date.issued1995en_HK
dc.identifier.citationProceedings Of Spie - The International Society For Optical Engineering, 1995, v. 2383, p. 99-109en_US
dc.identifier.issn0277-786Xen_HK
dc.identifier.urihttp://hdl.handle.net/10722/148989-
dc.description.abstractWe have designed and built integrated, movable micromirrors for on-chip alignment in silicon-optical-bench technology. The mirrors are fabricated using surface micromachining with three polysilicon layers. A polysilicon-hinge technology was used to achieve the required vertical dimensions and functionality for alignment in hybrid photonic integrated circuits. The positioning accuracy of the mirrors is measured to be on the order of 0.2 μm. This precision is shown theoretically and experimentally to be sufficient for laser-to-fiber coupling. In the experimental verification, we used external actuators to position the micromirror and obtained 45% coupling efficiency from a semiconductor laser (operating at 1.3 μm) to a standard single-mode optical fiber. The stability and robustness of the micromirrors were demonstrated in shock and vibration tests that showed that the micromirrors will withstand normal handling and operation without the need for welding or gluing. This micromirror technology combines the low-cost advantage of passive alignment and the accuracy of active alignment. In addition to optoelectronic packaging, the micromirrors can be expected to find applications in grating-tuned external-cavity lasers, scanning lasers, and interferometers.en_HK
dc.languageengen_US
dc.publisherS P I E - International Society for Optical Engineering. The Journal's web site is located at http://spie.org/x1848.xmlen_HK
dc.relation.ispartofProceedings of SPIE - The International Society for Optical Engineeringen_HK
dc.titlePrecision and performance of polysilicon micromirrors for opticsen_HK
dc.typeConference_Paperen_HK
dc.identifier.emailTien, Norman C: nctien@hku.hken_HK
dc.identifier.authorityTien, Norman C=rp01604en_HK
dc.description.naturelink_to_subscribed_fulltexten_US
dc.identifier.scopuseid_2-s2.0-0029226748en_HK
dc.identifier.volume2383en_HK
dc.identifier.spage99en_HK
dc.identifier.epage109en_HK
dc.publisher.placeUnited Statesen_HK
dc.identifier.scopusauthoridSolgaard, Olav=7005609097en_HK
dc.identifier.scopusauthoridTien, Norman C=7006532826en_HK
dc.identifier.scopusauthoridDaneman, Michael=7003552202en_HK
dc.identifier.scopusauthoridKiang, MengHsiung=7003422357en_HK
dc.identifier.scopusauthoridFriedberger, Alois=6601907426en_HK
dc.identifier.scopusauthoridMuller, Richard S=7404245946en_HK
dc.identifier.scopusauthoridLau, Kam Y=7401559989en_HK

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