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Conference Paper: Operating principles of an electrothermal vibrometer for optical switching applications
Title | Operating principles of an electrothermal vibrometer for optical switching applications |
---|---|
Authors | |
Issue Date | 1999 |
Publisher | S P I E - International Society for Optical Engineering. The Journal's web site is located at http://spie.org/x1848.xml |
Citation | Proceedings of SPIE - The International Society For Optical Engineering, 1999, v. 3878, p. 124-130 How to Cite? |
Abstract | A compact polysilicon surface-micromachined microactuator designed for optical switching applications is described. This actuator is fabricated using the foundry MUMPs process provided by Cronos Integrated Microsystems Inc. Actuated electrothermally, the microactuator allows fast switching speeds and can be operated with a low voltage square-wave signal. The design, operation mechanisms for this long-range and high frequency thermal actuation are described. A vertical micromirror integrated with this actuator can be operated with a 10.5 V, 20 kHz 15% duty-cycle pulse signal, achieving a lateral moving speed higher than 15.6 mm/sec. The optical switch has been operated to frequencies as high as 30 kHz. |
Persistent Identifier | http://hdl.handle.net/10722/148993 |
ISSN | 2023 SCImago Journal Rankings: 0.152 |
DC Field | Value | Language |
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dc.contributor.author | Pai, Minfan | en_HK |
dc.contributor.author | Tien, Norman C | en_HK |
dc.date.accessioned | 2012-06-20T06:17:44Z | - |
dc.date.available | 2012-06-20T06:17:44Z | - |
dc.date.issued | 1999 | en_HK |
dc.identifier.citation | Proceedings of SPIE - The International Society For Optical Engineering, 1999, v. 3878, p. 124-130 | en_US |
dc.identifier.issn | 0277-786X | en_HK |
dc.identifier.uri | http://hdl.handle.net/10722/148993 | - |
dc.description.abstract | A compact polysilicon surface-micromachined microactuator designed for optical switching applications is described. This actuator is fabricated using the foundry MUMPs process provided by Cronos Integrated Microsystems Inc. Actuated electrothermally, the microactuator allows fast switching speeds and can be operated with a low voltage square-wave signal. The design, operation mechanisms for this long-range and high frequency thermal actuation are described. A vertical micromirror integrated with this actuator can be operated with a 10.5 V, 20 kHz 15% duty-cycle pulse signal, achieving a lateral moving speed higher than 15.6 mm/sec. The optical switch has been operated to frequencies as high as 30 kHz. | en_HK |
dc.language | eng | en_US |
dc.publisher | S P I E - International Society for Optical Engineering. The Journal's web site is located at http://spie.org/x1848.xml | en_HK |
dc.relation.ispartof | Proceedings of SPIE - The International Society for Optical Engineering | en_HK |
dc.title | Operating principles of an electrothermal vibrometer for optical switching applications | en_HK |
dc.type | Conference_Paper | en_HK |
dc.identifier.email | Tien, Norman C: nctien@hku.hk | en_HK |
dc.identifier.authority | Tien, Norman C=rp01604 | en_HK |
dc.description.nature | link_to_subscribed_fulltext | en_US |
dc.identifier.doi | 10.1117/12.361253 | - |
dc.identifier.scopus | eid_2-s2.0-0033319790 | en_HK |
dc.identifier.volume | 3878 | en_HK |
dc.identifier.spage | 124 | en_HK |
dc.identifier.epage | 130 | en_HK |
dc.publisher.place | United States | en_HK |
dc.identifier.scopusauthorid | Pai, Minfan=7102233717 | en_HK |
dc.identifier.scopusauthorid | Tien, Norman C=7006532826 | en_HK |
dc.identifier.issnl | 0277-786X | - |