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Conference Paper: Operating principles of an electrothermal vibromotor for optical switching applications

TitleOperating principles of an electrothermal vibromotor for optical switching applications
Authors
Issue Date1999
PublisherS P I E - International Society for Optical Engineering. The Journal's web site is located at http://spie.org/x1848.xml
Citation
Proceedings Of Spie - The International Society For Optical Engineering, 1999, v. 3878, p. 124-130 How to Cite?
AbstractA compact polysilicon surface-micromachined microactuator designed for optical switching applications is described. This actuator is fabricated using the foundry MUMPs process provided by Cronos Integrated Microsystems Inc. Actuated electrothermally, the microactuator allows fast switching speeds and can be operated with a low voltage square-wave signal. The design, operation mechanisms for this long-range and high frequency thermal actuation are described. A vertical micromirror integrated with this actuator can be operated with a 10.5 V, 20 kHz 15% duty-cycle pulse signal, achieving a lateral moving speed higher than 15.6 mm/sec. The optical switch has been operated to frequencies as high as 30 kHz.
Persistent Identifierhttp://hdl.handle.net/10722/148993
ISSN

 

DC FieldValueLanguage
dc.contributor.authorPai, Minfanen_HK
dc.contributor.authorTien, Norman Cen_HK
dc.date.accessioned2012-06-20T06:17:44Z-
dc.date.available2012-06-20T06:17:44Z-
dc.date.issued1999en_HK
dc.identifier.citationProceedings Of Spie - The International Society For Optical Engineering, 1999, v. 3878, p. 124-130en_US
dc.identifier.issn0277-786Xen_HK
dc.identifier.urihttp://hdl.handle.net/10722/148993-
dc.description.abstractA compact polysilicon surface-micromachined microactuator designed for optical switching applications is described. This actuator is fabricated using the foundry MUMPs process provided by Cronos Integrated Microsystems Inc. Actuated electrothermally, the microactuator allows fast switching speeds and can be operated with a low voltage square-wave signal. The design, operation mechanisms for this long-range and high frequency thermal actuation are described. A vertical micromirror integrated with this actuator can be operated with a 10.5 V, 20 kHz 15% duty-cycle pulse signal, achieving a lateral moving speed higher than 15.6 mm/sec. The optical switch has been operated to frequencies as high as 30 kHz.en_HK
dc.languageengen_US
dc.publisherS P I E - International Society for Optical Engineering. The Journal's web site is located at http://spie.org/x1848.xmlen_HK
dc.relation.ispartofProceedings of SPIE - The International Society for Optical Engineeringen_HK
dc.titleOperating principles of an electrothermal vibromotor for optical switching applicationsen_HK
dc.typeConference_Paperen_HK
dc.identifier.emailTien, Norman C: nctien@hku.hken_HK
dc.identifier.authorityTien, Norman C=rp01604en_HK
dc.description.naturelink_to_subscribed_fulltexten_US
dc.identifier.scopuseid_2-s2.0-0033319790en_HK
dc.identifier.volume3878en_HK
dc.identifier.spage124en_HK
dc.identifier.epage130en_HK
dc.publisher.placeUnited Statesen_HK
dc.identifier.scopusauthoridPai, Minfan=7102233717en_HK
dc.identifier.scopusauthoridTien, Norman C=7006532826en_HK

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