Showing results 46 to 65 of 98
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| Title | Author(s) | Issue Date | Views | |
|---|---|---|---|---|
Linear microvibromotor for positioning optical components Journal:Journal of Microelectromechanical Systems | 1996 | 148 | ||
Linear microvibromotor for positioning optical components Proceeding/Conference:Proceedings of the IEEE Micro Electro Mechanical Systems | 1995 | 104 | ||
Low voltage electrothermal vibromotor for silicon optical bench applications Journal:Sensors and Actuators, A: Physical | 2000 | 197 | ||
A low-voltage lateral MEMS switch with high RF performance Journal:Journal of Microelectromechanical Systems | 2004 | 132 | ||
Low-voltage lateral-contact microrelays for RF applications Proceeding/Conference:Proceedings of the IEEE Micro Electro Mechanical Systems (MEMS) | 2002 | 101 | ||
A MEMS based optical coherence tomography imaging system and optical biopsy probes for real-time, high resolution in-vivo and in-vitro 2-D or 3-D imaging Proceeding/Conference:IEEE/LEOS International Conference on Optical MEMS and Their Applications Conference, 2006 | 2006 | 110 | ||
A micro flow sensor for volumetric measurement of conductive fluids Proceeding/Conference:2010 OSA-IEEE-COS Advances in Optoelectronics and Micro/Nano-Optics, AOM 2010 | 2010 | 117 | ||
A micro optical filter using polysilicon surface micromachining process Proceeding/Conference:Proceedings of SPIE - The International Society for Optical Engineering | 1997 | |||
A micro PDMS flow sensor based on time-of-flight measurement for conductive liquid Journal:Microsystem Technologies | 2013 | |||
Micro-optical inertial sensors using silicon MEMS Proceeding/Conference:IEEE Aerospace Applications Conference Proceedings | 1998 | 101 | ||
Microfabricated differential-mode gas sensor utilizing temperature compensation Proceeding/Conference:Proceedings of IEEE Sensors | 2010 | 110 | ||
A micromachined RF microrelay with electrothermal actuation Proceeding/Conference:Sensors and Actuators, A: Physical | 2003 | |||
Modeling and characterization of micromachined bi-directional electro-thermal vibromotors Proceeding/Conference:American Society of Mechanical Engineers, Micro-Electromechanical Systems Division Publication (MEMS) | 2003 | 112 | ||
Modeling and measurement of microfabricated corona discharge structures Proceeding/Conference:3rd IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS | 2008 | 113 | ||
| 1991 | 106 | |||
Monolithic transformer with underlying deep silicon-oxide block Journal:Electronics Letters | 2002 | 123 | ||
Multilayer passive RF microfabrication using jet-printed Au nanoparticle ink and aerosol-deposited dielectric Proceeding/Conference:International Conference on Solid State Sensors and Actuators Proceedings | 2013 | 54 | ||
Multiplexed label-free biosensor chip based on nanoscale electrical double layer capacitance sensing Proceeding/Conference:Proceedings of the 3rd ASME Integrated Nanosystems Conference - Design, Synthesis, and Applications | 2004 | 118 | ||
Nanoscale Al-Al and Cu-Cu contacts Proceeding/Conference:TRANSDUCERS and EUROSENSORS '07 - 4th International Conference on Solid-State Sensors, Actuators and Microsystems | 2007 | 105 | ||
New fabrication method for high-Q on-chip spiral inductor Proceeding/Conference:Proceedings of SPIE - The International Society for Optical Engineering | 1999 | 102 |