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Conference Paper: A micro optical filter using polysilicon surface micromachining process

TitleA micro optical filter using polysilicon surface micromachining process
Authors
KeywordsMEMS
Micro optics
Micromachining
Optical filter
Issue Date1997
PublisherS P I E - International Society for Optical Engineering. The Journal's web site is located at http://spie.org/x1848.xml
Citation
Proceedings Of Spie - The International Society For Optical Engineering, 1997, v. 3241, p. 216-220 How to Cite?
AbstractSurface micromachining fabrication process offers a novel approach for realizing micro-optical system onto a chip. A new micromachined micro optical filter which relies on intensity changes due to the interaction between a light beam and the optical shutter has been designed, fabricated and tested. The micro optical filter consists of a 2 micron thick polysilicon shutter suspended from the substrate by springs which are 200 micron long polysilicon folded beams. The sacrificial layer which is sandwiched between the silicon substrate and the structure is removed with a hydrofluoric acid wet etch, and a selfassembled monolayer coating is used to prevent friction. The filter is designed as a mass-spring system that moves in response to acceleration force. An application of accelerometer with higher sensitivity in a lower acceleration range is expected.
Persistent Identifierhttp://hdl.handle.net/10722/149027
ISSN
2014 SCImago Journal Rankings: 0.212
References

 

DC FieldValueLanguage
dc.contributor.authorAsundi, Aen_HK
dc.contributor.authorZheng, LDen_HK
dc.contributor.authorTien, NCen_HK
dc.contributor.authorChen, Zen_HK
dc.contributor.authorLiu, AQen_HK
dc.date.accessioned2012-06-20T06:17:58Z-
dc.date.available2012-06-20T06:17:58Z-
dc.date.issued1997en_HK
dc.identifier.citationProceedings Of Spie - The International Society For Optical Engineering, 1997, v. 3241, p. 216-220en_US
dc.identifier.issn0277-786Xen_HK
dc.identifier.urihttp://hdl.handle.net/10722/149027-
dc.description.abstractSurface micromachining fabrication process offers a novel approach for realizing micro-optical system onto a chip. A new micromachined micro optical filter which relies on intensity changes due to the interaction between a light beam and the optical shutter has been designed, fabricated and tested. The micro optical filter consists of a 2 micron thick polysilicon shutter suspended from the substrate by springs which are 200 micron long polysilicon folded beams. The sacrificial layer which is sandwiched between the silicon substrate and the structure is removed with a hydrofluoric acid wet etch, and a selfassembled monolayer coating is used to prevent friction. The filter is designed as a mass-spring system that moves in response to acceleration force. An application of accelerometer with higher sensitivity in a lower acceleration range is expected.en_HK
dc.languageengen_US
dc.publisherS P I E - International Society for Optical Engineering. The Journal's web site is located at http://spie.org/x1848.xmlen_HK
dc.relation.ispartofProceedings of SPIE - The International Society for Optical Engineeringen_HK
dc.subjectMEMSen_HK
dc.subjectMicro opticsen_HK
dc.subjectMicromachiningen_HK
dc.subjectOptical filteren_HK
dc.titleA micro optical filter using polysilicon surface micromachining processen_HK
dc.typeConference_Paperen_HK
dc.identifier.emailTien, NC: nctien@hku.hken_HK
dc.identifier.authorityTien, NC=rp01604en_HK
dc.description.naturelink_to_subscribed_fulltexten_US
dc.identifier.doi10.1117/12.293535en_HK
dc.identifier.scopuseid_2-s2.0-58049156669en_HK
dc.relation.referenceshttp://www.scopus.com/mlt/select.url?eid=2-s2.0-58049156669&selection=ref&src=s&origin=recordpageen_HK
dc.identifier.volume3241en_HK
dc.identifier.spage216en_HK
dc.identifier.epage220en_HK
dc.publisher.placeUnited Statesen_HK
dc.identifier.scopusauthoridAsundi, A=7102304400en_HK
dc.identifier.scopusauthoridZheng, LD=7403406549en_HK
dc.identifier.scopusauthoridTien, NC=7006532826en_HK
dc.identifier.scopusauthoridChen, Z=55196950300en_HK
dc.identifier.scopusauthoridLiu, AQ=7402583739en_HK

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