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Conference Paper: A micro optical filter using polysilicon surface micromachining process
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TitleA micro optical filter using polysilicon surface micromachining process
 
AuthorsAsundi, A3
Zheng, LD3
Tien, NC1 3
Chen, Z2 3
Liu, AQ2 3
 
KeywordsMEMS
Micro optics
Micromachining
Optical filter
 
Issue Date1997
 
PublisherS P I E - International Society for Optical Engineering. The Journal's web site is located at http://spie.org/x1848.xml
 
CitationProceedings Of Spie - The International Society For Optical Engineering, 1997, v. 3241, p. 216-220 [How to Cite?]
DOI: http://dx.doi.org/10.1117/12.293535
 
AbstractSurface micromachining fabrication process offers a novel approach for realizing micro-optical system onto a chip. A new micromachined micro optical filter which relies on intensity changes due to the interaction between a light beam and the optical shutter has been designed, fabricated and tested. The micro optical filter consists of a 2 micron thick polysilicon shutter suspended from the substrate by springs which are 200 micron long polysilicon folded beams. The sacrificial layer which is sandwiched between the silicon substrate and the structure is removed with a hydrofluoric acid wet etch, and a selfassembled monolayer coating is used to prevent friction. The filter is designed as a mass-spring system that moves in response to acceleration force. An application of accelerometer with higher sensitivity in a lower acceleration range is expected.
 
ISSN0277-786X
2012 SCImago Journal Rankings: 0.216
 
DOIhttp://dx.doi.org/10.1117/12.293535
 
ReferencesReferences in Scopus
 
DC FieldValue
dc.contributor.authorAsundi, A
 
dc.contributor.authorZheng, LD
 
dc.contributor.authorTien, NC
 
dc.contributor.authorChen, Z
 
dc.contributor.authorLiu, AQ
 
dc.date.accessioned2012-06-20T06:17:58Z
 
dc.date.available2012-06-20T06:17:58Z
 
dc.date.issued1997
 
dc.description.abstractSurface micromachining fabrication process offers a novel approach for realizing micro-optical system onto a chip. A new micromachined micro optical filter which relies on intensity changes due to the interaction between a light beam and the optical shutter has been designed, fabricated and tested. The micro optical filter consists of a 2 micron thick polysilicon shutter suspended from the substrate by springs which are 200 micron long polysilicon folded beams. The sacrificial layer which is sandwiched between the silicon substrate and the structure is removed with a hydrofluoric acid wet etch, and a selfassembled monolayer coating is used to prevent friction. The filter is designed as a mass-spring system that moves in response to acceleration force. An application of accelerometer with higher sensitivity in a lower acceleration range is expected.
 
dc.description.natureLink_to_subscribed_fulltext
 
dc.identifier.citationProceedings Of Spie - The International Society For Optical Engineering, 1997, v. 3241, p. 216-220 [How to Cite?]
DOI: http://dx.doi.org/10.1117/12.293535
 
dc.identifier.doihttp://dx.doi.org/10.1117/12.293535
 
dc.identifier.epage220
 
dc.identifier.issn0277-786X
2012 SCImago Journal Rankings: 0.216
 
dc.identifier.scopuseid_2-s2.0-58049156669
 
dc.identifier.spage216
 
dc.identifier.urihttp://hdl.handle.net/10722/149027
 
dc.identifier.volume3241
 
dc.languageeng
 
dc.publisherS P I E - International Society for Optical Engineering. The Journal's web site is located at http://spie.org/x1848.xml
 
dc.publisher.placeUnited States
 
dc.relation.ispartofProceedings of SPIE - The International Society for Optical Engineering
 
dc.relation.referencesReferences in Scopus
 
dc.subjectMEMS
 
dc.subjectMicro optics
 
dc.subjectMicromachining
 
dc.subjectOptical filter
 
dc.titleA micro optical filter using polysilicon surface micromachining process
 
dc.typeConference_Paper
 
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<contributor.author>Tien, NC</contributor.author>
<contributor.author>Chen, Z</contributor.author>
<contributor.author>Liu, AQ</contributor.author>
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<description.abstract>Surface micromachining fabrication process offers a novel approach for realizing micro-optical system onto a chip. A new micromachined micro optical filter which relies on intensity changes due to the interaction between a light beam and the optical shutter has been designed, fabricated and tested. The micro optical filter consists of a 2 micron thick polysilicon shutter suspended from the substrate by springs which are 200 micron long polysilicon folded beams. The sacrificial layer which is sandwiched between the silicon substrate and the structure is removed with a hydrofluoric acid wet etch, and a selfassembled monolayer coating is used to prevent friction. The filter is designed as a mass-spring system that moves in response to acceleration force. An application of accelerometer with higher sensitivity in a lower acceleration range is expected.</description.abstract>
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Author Affiliations
  1. Cornell University
  2. National University of Singapore
  3. Nanyang Technological University School of Mechanical &amp; Aerospace Engineering