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Conference Paper: Multilayer passive RF microfabrication using jet-printed Au nanoparticle ink and aerosol-deposited dielectric

TitleMultilayer passive RF microfabrication using jet-printed Au nanoparticle ink and aerosol-deposited dielectric
Authors
KeywordsAdditive microfabrication
Inkjet printing
Gold nanoparticles
Printed resonator
Issue Date2013
PublisherIEEE. The Journal's web site is located at http://ieeexplore.ieee.org/xpl/conhome.jsp?punumber=1000712
Citation
The 17th International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers & Eurosensors XXVII), Barcelona. Spain, 16-20 June 2013.In Conference Proceedings, 2013, p. 178-181, no. M3P.042 How to Cite?
AbstractWe report a bi-material additive microfabrication technique combining inkjet-printed gold films and an aerosol-deposited dielectric enamel for the realization of multilayer microsystems. Hexanethiol-encapsulated gold nanoparticle ink enables metal deposition at atmospheric pressure with a maximum temperature of 200°C. Dielectric patterning is achieved via shadow mask. Process utility is demonstrated for passive radio frequency components through the realization of spiral inductors and resonant parallel L-C tanks. The resulting device parameters agree well with theory, and the resonators exhibited a Q of 60 at 596MHz, the highest quality factor of an as-printed ink-jet microfabricated gold resonant structure to date. © 2013 IEEE.
Persistent Identifierhttp://hdl.handle.net/10722/189860
ISBN

 

DC FieldValueLanguage
dc.contributor.authorRoberts, RCen_US
dc.contributor.authorTien, NCen_US
dc.date.accessioned2013-09-17T15:00:58Z-
dc.date.available2013-09-17T15:00:58Z-
dc.date.issued2013en_US
dc.identifier.citationThe 17th International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers & Eurosensors XXVII), Barcelona. Spain, 16-20 June 2013.In Conference Proceedings, 2013, p. 178-181, no. M3P.042en_US
dc.identifier.isbn978-1-4673-5983-2-
dc.identifier.urihttp://hdl.handle.net/10722/189860-
dc.description.abstractWe report a bi-material additive microfabrication technique combining inkjet-printed gold films and an aerosol-deposited dielectric enamel for the realization of multilayer microsystems. Hexanethiol-encapsulated gold nanoparticle ink enables metal deposition at atmospheric pressure with a maximum temperature of 200°C. Dielectric patterning is achieved via shadow mask. Process utility is demonstrated for passive radio frequency components through the realization of spiral inductors and resonant parallel L-C tanks. The resulting device parameters agree well with theory, and the resonators exhibited a Q of 60 at 596MHz, the highest quality factor of an as-printed ink-jet microfabricated gold resonant structure to date. © 2013 IEEE.-
dc.languageengen_US
dc.publisherIEEE. The Journal's web site is located at http://ieeexplore.ieee.org/xpl/conhome.jsp?punumber=1000712-
dc.relation.ispartofInternational Conference on Solid State Sensors and Actuators Proceedingsen_US
dc.subjectAdditive microfabrication-
dc.subjectInkjet printing-
dc.subjectGold nanoparticles-
dc.subjectPrinted resonator-
dc.titleMultilayer passive RF microfabrication using jet-printed Au nanoparticle ink and aerosol-deposited dielectricen_US
dc.typeConference_Paperen_US
dc.identifier.emailRoberts, RC: rcr8@hku.hken_US
dc.identifier.emailTien, NC: nctien@hku.hken_US
dc.identifier.authorityRoberts, RC=rp01738en_US
dc.identifier.authorityTien, NC=rp01604en_US
dc.description.naturelink_to_subscribed_fulltext-
dc.identifier.doi10.1109/Transducers.2013.6626731-
dc.identifier.scopuseid_2-s2.0-84891705873-
dc.identifier.hkuros222877en_US
dc.identifier.hkuros239536-
dc.identifier.spage178en_US
dc.identifier.epage181en_US
dc.publisher.placeUnited States-
dc.customcontrol.immutablesml 131023-

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