Showing results 78 to 97 of 98
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Title | Author(s) | Issue Date | |
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Selective chemical etching of InP over InAlAs Journal:Journal of the Electrochemical Society | 1992 | ||
Silicon carbide (SiC) membrane nanomechanical resonators with multiple vibrational modes Proceeding/Conference:2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11 | 2011 | ||
Silicon micromachined thermal sensors and actuators Journal:Microscale Thermophysical Engineering | 1997 | ||
1989 | |||
Surface adhesion reduction in silicon microstructures using femtosecond laser pulses Journal:Applied Physics Letters | 1996 | ||
Surface-micromachined mirrors for laser-beam positioning Proceeding/Conference:International Conference on Solid-State Sensors and Actuators, and Eurosensors IX, Proceedings | 1995 | ||
Surface-micromachined mirrors for laser-beam positioning Journal:Sensors and Actuators, A: Physical | 1996 | ||
System design for micropositioning and sensing of micro-electromechanical (MEM) actuators Proceeding/Conference:Conference Record - IEEE Instrumentation and Measurement Technology Conference | 2000 | ||
Thermoresistive characteristics of sintered inkjet printed gold nanoparticle microstructures Proceeding/Conference:IEEE Sensors Proceedings | 2012 | ||
Thick polysilicon surface-micromachined optically sensed accelerometer Proceeding/Conference:Proceedings of SPIE - The International Society for Optical Engineering | 1999 | ||
A three dimensional real-time MEMS based optical biopsy system for in-vivo clinical imaging Proceeding/Conference:TRANSDUCERS and EUROSENSORS '07 - 4th International Conference on Solid-State Sensors, Actuators and Microsystems | 2007 | ||
Three-dimensional endoscopic optical coherence tomography by use of a two-axis microelectromechanical scanning mirror Journal:Applied Physics Letters | 2006 | ||
Three-dimensional optical coherence tomography employing a 2-axis microelectromechanical scanning mirror Journal:IEEE Journal on Selected Topics in Quantum Electronics | 2005 | ||
A time-of-flight flow sensor for the volume measurement of trace amount of interstitial fluid Journal:Journal of Micromechanics and Microengineering | 2012 | ||
Tunable RF MEMS elements Proceeding/Conference:International Conference on Solid-State and Integrated Circuits Technology Proceedings, ICSICT | 2004 | ||
Tunable solenoid microinductors utilizing permalloy electro-thermal vibromotors Proceeding/Conference:Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS) | 2004 | ||
Ultra-wide tuning range silicon MEMS capacitors on glass with tera-ohm isolation and low parasitics Proceeding/Conference:Digest of Technical Papers - International Conference on Solid State Sensors and Actuators and Microsystems, TRANSDUCERS '05 | 2005 | ||
Ultrashort-pulse laser heating of silicon to reduce microstructure adhesion Journal:International Journal of Heat and Mass Transfer | 1996 | ||
A unipolar corona discharge microfabricated ionizer structure for gases at atmospheric pressure and composition Proceeding/Conference:Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS) | 2004 | ||
Unstrained, modulation-doped, In 0.3Ga 0.7As/In 0.29Al 0.71As field-effect transistor grown on GaAs substrate Journal:IEEE Electron Device Letters | 1992 |