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Conference Paper: Silicon carbide (SiC) membrane nanomechanical resonators with multiple vibrational modes

TitleSilicon carbide (SiC) membrane nanomechanical resonators with multiple vibrational modes
Authors
Barnes, ACRoberts, RCTien, NCZorman, CAFeng, PXL
KeywordsMembrane
Nanoelectromechanical Systems
Resonator
Silicon Carbide (SiC)
Vibrational Modes
Issue Date2011
Citation
2011 16Th International Solid-State Sensors, Actuators And Microsystems Conference, Transducers'11, 2011, p. 2614-2617 How to Cite?
DOI: http://dx.doi.org/10.1109/TRANSDUCERS.2011.5969837
AbstractWe report on experimental demonstration of a new type of nanomechanical resonators based on very thin silicon carbide (SiC) square membranes. An optical interferometry with a radio-frequency two-port measurement scheme enables sensitive and efficient detection of many vibrational modes of the membranes. Membranes with sizes up to 1mm × 1mm and thicknesses down to t ≤ 500nm, offer very high aspect ratios and compelling resonance spectra of multiple-mode operations from kHz range to the HF (3-30MHz) band. Typical resonances have Q's ∼ 800-30000 at room temperature and in vacuum of ∼20mTorr. Some high-Q modes exhibit fairly strong nonlinear effects. © 2011 IEEE.
Persistent Identifierhttp://hdl.handle.net/10722/149034
References
References in Scopus

 

DC FieldValueLanguage
dc.contributor.authorBarnes, ACen_HK
dc.contributor.authorRoberts, RCen_HK
dc.contributor.authorTien, NCen_HK
dc.contributor.authorZorman, CAen_HK
dc.contributor.authorFeng, PXLen_HK
dc.date.accessioned2012-06-20T06:18:00Z-
dc.date.available2012-06-20T06:18:00Z-
dc.date.issued2011en_HK
dc.identifier.citation2011 16Th International Solid-State Sensors, Actuators And Microsystems Conference, Transducers'11, 2011, p. 2614-2617en_US
dc.identifier.urihttp://hdl.handle.net/10722/149034-
dc.description.abstractWe report on experimental demonstration of a new type of nanomechanical resonators based on very thin silicon carbide (SiC) square membranes. An optical interferometry with a radio-frequency two-port measurement scheme enables sensitive and efficient detection of many vibrational modes of the membranes. Membranes with sizes up to 1mm × 1mm and thicknesses down to t ≤ 500nm, offer very high aspect ratios and compelling resonance spectra of multiple-mode operations from kHz range to the HF (3-30MHz) band. Typical resonances have Q's ∼ 800-30000 at room temperature and in vacuum of ∼20mTorr. Some high-Q modes exhibit fairly strong nonlinear effects. © 2011 IEEE.en_HK
dc.languageengen_US
dc.relation.ispartof2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11en_HK
dc.subjectMembraneen_HK
dc.subjectNanoelectromechanical Systemsen_HK
dc.subjectResonatoren_HK
dc.subjectSilicon Carbide (SiC)en_HK
dc.subjectVibrational Modesen_HK
dc.titleSilicon carbide (SiC) membrane nanomechanical resonators with multiple vibrational modesen_HK
dc.typeConference_Paperen_HK
dc.identifier.emailRoberts, RC: rcr8@hku.hken_HK
dc.identifier.emailTien, NC: nctien@hku.hken_HK
dc.identifier.authorityRoberts, RC=rp01738en_HK
dc.identifier.authorityTien, NC=rp01604en_HK
dc.description.naturelink_to_subscribed_fulltexten_US
dc.identifier.doi10.1109/TRANSDUCERS.2011.5969837en_HK
dc.identifier.scopuseid_2-s2.0-80052104787en_HK
dc.relation.referenceshttp://www.scopus.com/mlt/select.url?eid=2-s2.0-80052104787&selection=ref&src=s&origin=recordpageen_HK
dc.identifier.spage2614en_HK
dc.identifier.epage2617en_HK
dc.identifier.scopusauthoridBarnes, AC=50161093900en_HK
dc.identifier.scopusauthoridRoberts, RC=24466830100en_HK
dc.identifier.scopusauthoridTien, NC=7006532826en_HK
dc.identifier.scopusauthoridZorman, CA=7005077073en_HK
dc.identifier.scopusauthoridFeng, PXL=48761150300en_HK

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