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- Publisher Website: 10.1109/SENSOR.2005.1496642
- Scopus: eid_2-s2.0-27544480933
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Conference Paper: Ultra-wide tuning range silicon MEMS capacitors on glass with tera-ohm isolation and low parasitics
Title | Ultra-wide tuning range silicon MEMS capacitors on glass with tera-ohm isolation and low parasitics |
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Authors | |
Keywords | Capacitors Low-parasitic Microelectromechanical devices Tunable circuits and devices Varactor |
Issue Date | 2005 |
Citation | Digest Of Technical Papers - International Conference On Solid State Sensors And Actuators And Microsystems, Transducers '05, 2005, v. 1, p. 1075-1079 How to Cite? |
Abstract | Theoretical and experimental results of a design methodology and fabrication technology to realize ultra-wide tuning range, electrostatic, silicon micromachined capacitors are presented. The varactors achieve a maximum tuning range of approximately 4000% and exhibit a linear tuning range of 1000% (C vs. V 2). The devices are also designed and characterized with tera-ohm isolation and sub 30fF capacitive coupling between the driving actuator and tuning element. In addition, parasitic capacitances have been minimized to less than 22fF at the tuning element terminals. © 2005 IEEE. |
Persistent Identifier | http://hdl.handle.net/10722/149009 |
References |
DC Field | Value | Language |
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dc.contributor.author | McCormick, DT | en_HK |
dc.contributor.author | Tien, NC | en_HK |
dc.contributor.author | MacDonald, N | en_HK |
dc.contributor.author | Matthews, R | en_HK |
dc.contributor.author | Hibbs, A | en_HK |
dc.date.accessioned | 2012-06-20T06:17:50Z | - |
dc.date.available | 2012-06-20T06:17:50Z | - |
dc.date.issued | 2005 | en_HK |
dc.identifier.citation | Digest Of Technical Papers - International Conference On Solid State Sensors And Actuators And Microsystems, Transducers '05, 2005, v. 1, p. 1075-1079 | en_US |
dc.identifier.uri | http://hdl.handle.net/10722/149009 | - |
dc.description.abstract | Theoretical and experimental results of a design methodology and fabrication technology to realize ultra-wide tuning range, electrostatic, silicon micromachined capacitors are presented. The varactors achieve a maximum tuning range of approximately 4000% and exhibit a linear tuning range of 1000% (C vs. V 2). The devices are also designed and characterized with tera-ohm isolation and sub 30fF capacitive coupling between the driving actuator and tuning element. In addition, parasitic capacitances have been minimized to less than 22fF at the tuning element terminals. © 2005 IEEE. | en_HK |
dc.language | eng | en_US |
dc.relation.ispartof | Digest of Technical Papers - International Conference on Solid State Sensors and Actuators and Microsystems, TRANSDUCERS '05 | en_HK |
dc.subject | Capacitors | en_HK |
dc.subject | Low-parasitic | en_HK |
dc.subject | Microelectromechanical devices | en_HK |
dc.subject | Tunable circuits and devices | en_HK |
dc.subject | Varactor | en_HK |
dc.title | Ultra-wide tuning range silicon MEMS capacitors on glass with tera-ohm isolation and low parasitics | en_HK |
dc.type | Conference_Paper | en_HK |
dc.identifier.email | Tien, NC: nctien@hku.hk | en_HK |
dc.identifier.authority | Tien, NC=rp01604 | en_HK |
dc.description.nature | link_to_subscribed_fulltext | en_US |
dc.identifier.doi | 10.1109/SENSOR.2005.1496642 | en_HK |
dc.identifier.scopus | eid_2-s2.0-27544480933 | en_HK |
dc.relation.references | http://www.scopus.com/mlt/select.url?eid=2-s2.0-27544480933&selection=ref&src=s&origin=recordpage | en_HK |
dc.identifier.volume | 1 | en_HK |
dc.identifier.spage | 1075 | en_HK |
dc.identifier.epage | 1079 | en_HK |
dc.identifier.scopusauthorid | McCormick, DT=7202521902 | en_HK |
dc.identifier.scopusauthorid | Tien, NC=7006532826 | en_HK |
dc.identifier.scopusauthorid | MacDonald, N=36476609100 | en_HK |
dc.identifier.scopusauthorid | Matthews, R=7402909719 | en_HK |
dc.identifier.scopusauthorid | Hibbs, A=7004275519 | en_HK |