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Conference Paper: System design for micropositioning and sensing of micro-electromechanical (MEM) actuators

TitleSystem design for micropositioning and sensing of micro-electromechanical (MEM) actuators
Authors
Madanagopal, KVTien, Norman C
Issue Date2000
Citation
Conference Record - Ieee Instrumentation And Measurement Technology Conference, 2000, v. 3, p. 1204-1207 How to Cite?
AbstractWe present the system design and open loop positioning of a large displacement (approximately 25 μm), single crystal silicon, folded spring lateral actuator. The static and dynamic characteristics of the actuator are measured and the actuator resembles a linear, mass-spring-damper second order system. The 25 μm static displacement is obtained at 68 V. Dynamic positioning is demonstrated by an open loop displacement stepping of 13 μm.
Persistent Identifierhttp://hdl.handle.net/10722/148995

 

DC FieldValueLanguage
dc.contributor.authorMadanagopal, KVen_HK
dc.contributor.authorTien, Norman Cen_HK
dc.date.accessioned2012-06-20T06:17:45Z-
dc.date.available2012-06-20T06:17:45Z-
dc.date.issued2000en_HK
dc.identifier.citationConference Record - Ieee Instrumentation And Measurement Technology Conference, 2000, v. 3, p. 1204-1207en_US
dc.identifier.urihttp://hdl.handle.net/10722/148995-
dc.description.abstractWe present the system design and open loop positioning of a large displacement (approximately 25 μm), single crystal silicon, folded spring lateral actuator. The static and dynamic characteristics of the actuator are measured and the actuator resembles a linear, mass-spring-damper second order system. The 25 μm static displacement is obtained at 68 V. Dynamic positioning is demonstrated by an open loop displacement stepping of 13 μm.en_HK
dc.languageengen_US
dc.relation.ispartofConference Record - IEEE Instrumentation and Measurement Technology Conferenceen_HK
dc.titleSystem design for micropositioning and sensing of micro-electromechanical (MEM) actuatorsen_HK
dc.typeConference_Paperen_HK
dc.identifier.emailTien, Norman C: nctien@hku.hken_HK
dc.identifier.authorityTien, Norman C=rp01604en_HK
dc.description.naturelink_to_subscribed_fulltexten_US
dc.identifier.scopuseid_2-s2.0-0033689886en_HK
dc.identifier.volume3en_HK
dc.identifier.spage1204en_HK
dc.identifier.epage1207en_HK
dc.identifier.scopusauthoridMadanagopal, KV=6506770467en_HK
dc.identifier.scopusauthoridTien, Norman C=7006532826en_HK

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