File Download
There are no files associated with this item.
Supplementary
-
Citations:
- Scopus: 0
- Appears in Collections:
Conference Paper: Tunable solenoid microinductors utilizing permalloy electro-thermal vibromotors
Title | Tunable solenoid microinductors utilizing permalloy electro-thermal vibromotors |
---|---|
Authors | |
Issue Date | 2004 |
Citation | Proceedings Of The Ieee International Conference On Micro Electro Mechanical Systems (Mems), 2004, p. 793-796 How to Cite? |
Abstract | This paper presents a first-of-its-kind micromachined tunable solenoid microinductor with tuning ratio as high as 18:1 at 10kHz. A tuning mechanism using a permalloy linear vibromotor enables low power consumption, low driving voltage (less than 1 volt), and long travel distance. A low temperature batch process is developed to integrate the microinductor structure and vibromotor. The measured inductance is on the order of 10nH and rolls off at 1MHz. Potential applications include performance optimization and functionality enhancement to magnetic microsensors and micromagnetic power devices, such as dc/dc converter. |
Persistent Identifier | http://hdl.handle.net/10722/149013 |
ISSN | 2023 SCImago Journal Rankings: 0.322 |
References |
DC Field | Value | Language |
---|---|---|
dc.contributor.author | Shih, WP | en_HK |
dc.contributor.author | Li, Z | en_HK |
dc.contributor.author | McCormick, DT | en_HK |
dc.contributor.author | Tien, NC | en_HK |
dc.contributor.author | Hui, CY | en_HK |
dc.date.accessioned | 2012-06-20T06:17:51Z | - |
dc.date.available | 2012-06-20T06:17:51Z | - |
dc.date.issued | 2004 | en_HK |
dc.identifier.citation | Proceedings Of The Ieee International Conference On Micro Electro Mechanical Systems (Mems), 2004, p. 793-796 | en_US |
dc.identifier.issn | 1084-6999 | en_HK |
dc.identifier.uri | http://hdl.handle.net/10722/149013 | - |
dc.description.abstract | This paper presents a first-of-its-kind micromachined tunable solenoid microinductor with tuning ratio as high as 18:1 at 10kHz. A tuning mechanism using a permalloy linear vibromotor enables low power consumption, low driving voltage (less than 1 volt), and long travel distance. A low temperature batch process is developed to integrate the microinductor structure and vibromotor. The measured inductance is on the order of 10nH and rolls off at 1MHz. Potential applications include performance optimization and functionality enhancement to magnetic microsensors and micromagnetic power devices, such as dc/dc converter. | en_HK |
dc.language | eng | en_US |
dc.relation.ispartof | Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS) | en_HK |
dc.title | Tunable solenoid microinductors utilizing permalloy electro-thermal vibromotors | en_HK |
dc.type | Conference_Paper | en_HK |
dc.identifier.email | Tien, NC: nctien@hku.hk | en_HK |
dc.identifier.authority | Tien, NC=rp01604 | en_HK |
dc.description.nature | link_to_subscribed_fulltext | en_US |
dc.identifier.scopus | eid_2-s2.0-3042745239 | en_HK |
dc.relation.references | http://www.scopus.com/mlt/select.url?eid=2-s2.0-3042745239&selection=ref&src=s&origin=recordpage | en_HK |
dc.identifier.spage | 793 | en_HK |
dc.identifier.epage | 796 | en_HK |
dc.publisher.place | United States | en_HK |
dc.identifier.scopusauthorid | Shih, WP=8972649800 | en_HK |
dc.identifier.scopusauthorid | Li, Z=24306828000 | en_HK |
dc.identifier.scopusauthorid | McCormick, DT=7202521902 | en_HK |
dc.identifier.scopusauthorid | Tien, NC=7006532826 | en_HK |
dc.identifier.scopusauthorid | Hui, CY=7202876972 | en_HK |
dc.identifier.issnl | 1084-6999 | - |