Browsing by Author Jia, N

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Showing results 10 to 17 of 17 < previous 
TitleAuthor(s)Issue DateViews
 
Performance analysis of pixelated source-mask optimization for optical microlithography
Proceeding/Conference:2010 IEEE International Conference of Electron Devices and Solid-State Circuits, EDSSC 2010
Jia, NLam, EY
2010
 
Pixelated source mask optimization for process robustness in optical lithography
Journal:Optics Express
Jia, NLam, EY
2011
144
 
Regularization of inverse photomask synthesis to enhance manufacturability
Proceeding/Conference:Proceedings of SPIE - The International Society for Optical Engineering
Jia, NWong, AKLam, EY
2009
182
 
A robust computational algorithm for inverse photomask synthesis in optical projection lithography
Journal:SIAM Journal on Imaging Sciences
Choy, SKJia, NTong, CSTang, MLLam, EYM
2012
193
 
Robust level-set-based inverse lithography
Journal:Optics Express
Shen, YJia, NWong, NLam, EY
2011
144
 
Robust mask design with defocus variation using inverse synthesis
Proceeding/Conference:Proceedings of SPIE
Jia, NWong, AKLam, EY
2008
 
Robustness enhancement in optical lithography: From pixelated mask optimization to pixelated source-mask optimization
Proceeding/Conference:ECS Transactions
Jia, NLam, EY
2011
130
 
Stochastic gradient descent for robust inverse photomask synthesis in optical lithography
Proceeding/Conference:Proceedings - International Conference on Image Processing, ICIP
Jia, NLam, EY
2010
Showing results 10 to 17 of 17 < previous