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Results 1-25 of 96 (Search time: 0.037 seconds).

TitleAuthor(s)Issue DateViews
 
Linear microvibromotor for positioning optical components
Journal:Journal of Microelectromechanical Systems
1996
148
 
1996
 
1995
201
 
2002
123
 
2004
145
 
1992
104
 
2004
 
2004
 
2001
97
 
2004
 
2002
 
2007
 
1999
173
 
Electrothermally actuated bi-directional linear vibromotor
Journal:Microscale Thermophysical Engineering
1999
 
2008
200
 
2006
 
1987
 
2012
112
 
2007
 
2005
 
A low-voltage lateral MEMS switch with high RF performance
Journal:Journal of Microelectromechanical Systems
2004
132
 
2000
197
 
Copper-encapsulated silicon micromachined structures
Journal:Journal of Microelectromechanical Systems
2000
184
 
2000
 
2000