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Article: Linear microvibromotor for positioning optical components

TitleLinear microvibromotor for positioning optical components
Authors
Daneman, MJTien, NCSolgaard, OPisano, APLau, KYMuller, RS
Issue Date1996
Citation
Journal Of Microelectromechanical Systems, 1996, v. 5 n. 3, p. 159-165 How to Cite?
DOI: http://dx.doi.org/10.1109/84.536622
AbstractWe report an electrostatically driven linear microvibromotor fabricated using surface-micromachining technology. This device is developed for use in actuated micro-optical systems on silicon. Its submicron positioning resolution and a travel range of over 350 μm are excellent properties for this application. Vibromotor precision and velocity are characterized, and various drive methods are discussed. A simulation of the vibromotor dynamics is presented to explore optimization and control issues for this device.
Persistent Identifierhttp://hdl.handle.net/10722/148930
ISSN
1057-7157
2023 Impact Factor: 2.5
2023 SCImago Journal Rankings: 0.744
ISI Accession Number ID
WOS:A1996VH43900003
References
References in Scopus

 

DC FieldValueLanguage
dc.contributor.authorDaneman, MJen_HK
dc.contributor.authorTien, NCen_HK
dc.contributor.authorSolgaard, Oen_HK
dc.contributor.authorPisano, APen_HK
dc.contributor.authorLau, KYen_HK
dc.contributor.authorMuller, RSen_HK
dc.date.accessioned2012-06-20T06:16:53Z-
dc.date.available2012-06-20T06:16:53Z-
dc.date.issued1996en_HK
dc.identifier.citationJournal Of Microelectromechanical Systems, 1996, v. 5 n. 3, p. 159-165en_HK
dc.identifier.issn1057-7157en_HK
dc.identifier.urihttp://hdl.handle.net/10722/148930-
dc.description.abstractWe report an electrostatically driven linear microvibromotor fabricated using surface-micromachining technology. This device is developed for use in actuated micro-optical systems on silicon. Its submicron positioning resolution and a travel range of over 350 μm are excellent properties for this application. Vibromotor precision and velocity are characterized, and various drive methods are discussed. A simulation of the vibromotor dynamics is presented to explore optimization and control issues for this device.en_HK
dc.languageengen_US
dc.relation.ispartofJournal of Microelectromechanical Systemsen_HK
dc.titleLinear microvibromotor for positioning optical componentsen_HK
dc.typeArticleen_HK
dc.identifier.emailTien, NC: nctien@hku.hken_HK
dc.identifier.authorityTien, NC=rp01604en_HK
dc.description.naturelink_to_subscribed_fulltexten_US
dc.identifier.doi10.1109/84.536622en_HK
dc.identifier.scopuseid_2-s2.0-0030246625en_HK
dc.relation.referenceshttp://www.scopus.com/mlt/select.url?eid=2-s2.0-0030246625&selection=ref&src=s&origin=recordpageen_HK
dc.identifier.volume5en_HK
dc.identifier.issue3en_HK
dc.identifier.spage159en_HK
dc.identifier.epage165en_HK
dc.identifier.isiWOS:A1996VH43900003-
dc.publisher.placeUnited Statesen_HK
dc.identifier.scopusauthoridDaneman, MJ=7003552202en_HK
dc.identifier.scopusauthoridTien, NC=7006532826en_HK
dc.identifier.scopusauthoridSolgaard, O=7005609097en_HK
dc.identifier.scopusauthoridPisano, AP=7103194270en_HK
dc.identifier.scopusauthoridLau, KY=7401559989en_HK
dc.identifier.scopusauthoridMuller, RS=7404245946en_HK
dc.identifier.issnl1057-7157-

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