Showing results 1 to 6 of 6
Title | Author(s) | Issue Date | Views | |
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On-chip spiral inductors suspended over deep copper-lined cavities Journal:IEEE Transactions on Microwave Theory and Techniques | 2000 | 129 | ||
Monolithic transformer with underlying deep silicon-oxide block Journal:Electronics Letters | 2002 | 108 | ||
Integrated polysilicon and DRIE bulk silicon micromachining for an electrostatic torsional actuator Journal:Journal of Microelectromechanical Systems | 1999 | 158 | ||
Fabrication of thick silicon dioxide sacrificial and isolation blocks in a silicon substrate Journal:Journal of Micromechanics and Microengineering | 2002 | 164 | ||
Fabrication of high-performance on-chip suspended spiral inductors by micromachining and electroless copper plating Journal:IEEE MTT-S International Microwave Symposium Digest | 2000 | 111 | ||
Copper-encapsulated silicon micromachined structures Journal:Journal of Microelectromechanical Systems | 2000 | 173 |