Showing results 3 to 7 of 7
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Title | Author(s) | Issue Date | |
---|---|---|---|
Electrostatic model for an asymmetric combdrive Journal:Journal of Microelectromechanical Systems | 2000 | ||
Fabrication of high-performance on-chip suspended spiral inductors by micromachining and electroless copper plating Journal:IEEE MTT-S International Microwave Symposium Digest | 2000 | ||
Fabrication of thick silicon dioxide sacrificial and isolation blocks in a silicon substrate Journal:Journal of Micromechanics and Microengineering | 2002 | ||
Integrated polysilicon and DRIE bulk silicon micromachining for an electrostatic torsional actuator Journal:Journal of Microelectromechanical Systems | 1999 | ||
On-chip spiral inductors suspended over deep copper-lined cavities Journal:IEEE Transactions on Microwave Theory and Techniques | 2000 |