Browsing by Author rp01581

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TitleAuthor(s)Issue DateViews
 
2016
56
 
9-Jan-2023
 
2016
111
 
2018
27
 
2019
42
 
2022
 
2014
 
2017
76
 
Induction-heated nanoimprint on soda-lime glass using sapphire molds
Journal:Journal of Vacuum Science and Technology: Part B Nanotechnology & Microelectronics
2016
93
InGaAs/InP subwavelength grating filters for the mid-infrared
Proceeding/Conference:Lasers and Electro-Optics/Quantum Electronics and Laser Science Conference: 2010 Laser Science to Photonic Applications, CLEO/QELS 2010
2010
123
 
Interference Lithography and Nanoimprint Lithography for Nanooptic Devices over Wafer-scale Area
Proceeding/Conference:IEEE International Conference on Nano/Micro Engineered and Molecular Systems (IEEE-NEMS) 2019
2019
45
Large-area metal grid ultraviolet filter fabricated by nanoimprint lithography
Proceeding/Conference:Conference on Lasers and Electro-Optics, 2007, CLEO 2007
2007
 
2018
222
 
2019
 
2017
 
Nanoimprint lithography with ≤60 nm overlay precision
Journal:HP Laboratories Technical Report
2012
 
2012
49
 
Nanostructure transfer using cyclic olefin copolymer templates fabricated by thermal nanoimprint lithography
Journal:Journal of Vacuum Science and Technology: Part B Nanotechnology & Microelectronics
2014
78
 
2019
 
2017
55