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Article: Induction-heated nanoimprint on soda-lime glass using sapphire molds

TitleInduction-heated nanoimprint on soda-lime glass using sapphire molds
Authors
Issue Date2016
PublisherAmerican Vacuum Society. The Journal's web site is located at http://avspublications.org/jvstb/
Citation
Journal of Vacuum Science and Technology: Part B Nanotechnology & Microelectronics, 2016, v. 34, p. 06K408:1-7 How to Cite?
Persistent Identifierhttp://hdl.handle.net/10722/245060
ISSN

 

DC FieldValueLanguage
dc.contributor.authorCAI, J-
dc.contributor.authorLI, S-
dc.contributor.authorGuo, X-
dc.contributor.authorGe, H-
dc.contributor.authorLi, W-
dc.date.accessioned2017-09-18T02:03:55Z-
dc.date.available2017-09-18T02:03:55Z-
dc.date.issued2016-
dc.identifier.citationJournal of Vacuum Science and Technology: Part B Nanotechnology & Microelectronics, 2016, v. 34, p. 06K408:1-7-
dc.identifier.issn2166-2746-
dc.identifier.urihttp://hdl.handle.net/10722/245060-
dc.languageeng-
dc.publisherAmerican Vacuum Society. The Journal's web site is located at http://avspublications.org/jvstb/-
dc.relation.ispartofJournal of Vacuum Science and Technology: Part B Nanotechnology & Microelectronics-
dc.rightsAfter publication by AVS, the author is required to post the following copyright notice: Copyright (2016) American Vacuum Society. This article may be downloaded for personal use only. Any other use requires prior permission of the author and the American Vacuum Society. The following article appeared in (Journal of Vacuum Science and Technology: Part B Nanotechnology & Microelectronics, 2016, v. 34, p. 06K408:1-7) and may be found at (http://dx.doi.org/10.1116/1.4966557).-
dc.rightsThis work is licensed under a Creative Commons Attribution-NonCommercial-NoDerivatives 4.0 International License.-
dc.titleInduction-heated nanoimprint on soda-lime glass using sapphire molds-
dc.typeArticle-
dc.identifier.emailLi, W: liwd@hku.hk-
dc.identifier.authorityLi, W=rp01581-
dc.description.naturepublished_or_final_version-
dc.identifier.doi10.1116/1.4966557-
dc.identifier.hkuros276662-
dc.identifier.volume34-
dc.identifier.spage06K408:1-
dc.identifier.epage7-
dc.publisher.placeUnited States-

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