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Article: Nanostructure transfer using cyclic olefin copolymer templates fabricated by thermal nanoimprint lithography

TitleNanostructure transfer using cyclic olefin copolymer templates fabricated by thermal nanoimprint lithography
Authors
Issue Date2014
Citation
Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics, 2014, v. 32, article no. 06FI02 How to Cite?
Persistent Identifierhttp://hdl.handle.net/10722/214229

 

DC FieldValueLanguage
dc.contributor.authorKHAN, A-
dc.contributor.authorLI, S-
dc.contributor.authorTANG, X-
dc.contributor.authorLi, W-
dc.date.accessioned2015-08-21T10:55:33Z-
dc.date.available2015-08-21T10:55:33Z-
dc.date.issued2014-
dc.identifier.citationJournal of Vacuum Science & Technology B, Nanotechnology and Microelectronics, 2014, v. 32, article no. 06FI02-
dc.identifier.urihttp://hdl.handle.net/10722/214229-
dc.languageeng-
dc.relation.ispartofJournal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena-
dc.rightsCreative Commons: Attribution 3.0 Hong Kong License-
dc.rightsCopyright (2015) American Vacuum Society. This article may be downloaded for personal use only. Any other use requires prior permission of the author and the American Vacuum Society. The following article appeared in (Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics, 2014, v. 32, article no. 06FI02) and may be found at (http://dx.doi.org/10.1116/1.4900609).-
dc.titleNanostructure transfer using cyclic olefin copolymer templates fabricated by thermal nanoimprint lithography-
dc.typeArticle-
dc.identifier.emailLi, W: liwd@hku.hk-
dc.identifier.authorityLi, W=rp01581-
dc.description.naturepublished_or_final_version-
dc.identifier.doi10.1116/1.4900609-
dc.identifier.hkuros249575-
dc.identifier.volume32-
dc.identifier.spagearticle no. 06FI02-
dc.identifier.epagearticle no. 06FI02-

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