Showing results 1 to 6 of 6
| Title | Author(s) | Issue Date | |
|---|---|---|---|
Fabrication and analysis of integrated MEMS pyramidal horn antenna for terahertz applications Proceeding/Conference:2012 7th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2012 | 2012 | ||
Fabrication of silica nanowire bunch arrays in SiO vapor generated by oxygen plasma etching of silicon Proceeding/Conference:Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS) | 2013 | ||
Fabrication of suspended periodic nanostructure by focused ion beam induced material migration and Rayleigh-Plateau instability Proceeding/Conference:Proceedings of the IEEE Conference on Nanotechnology | 2013 | ||
Stress-assistant selective etching mechanism for lithography-independent nanofabrication Proceeding/Conference:TRANSDUCERS 2009 - 15th International Conference on Solid-State Sensors, Actuators and Microsystems | 2009 | ||
Ultra-fine nanofabrication by hybrid of energetic ion induced fluidization and stress Proceeding/Conference:Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS) | 2011 | ||
Ultrasensitive mass sensor using the out-of-phase vibration eigenstate of intercoupled dual-microcantilevers Proceeding/Conference:2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11 | 2011 |