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- Publisher Website: 10.1109/MEMSYS.2011.5734431
- Scopus: eid_2-s2.0-79953799224
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Conference Paper: Ultra-fine nanofabrication by hybrid of energetic ion induced fluidization and stress
Title | Ultra-fine nanofabrication by hybrid of energetic ion induced fluidization and stress |
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Authors | |
Issue Date | 2011 |
Citation | Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS), 2011, p. 340-343 How to Cite? |
Abstract | This paper reports a novel method for nanofabrication utilizing the hybrid of energetic ion induced fluidization and stress. In the method, large-area irradiation of focused ion beam (FIB) on suspended film structures such as clamped-clamped cantilevers is adopted. The ion (such as Ga+) bombardment causes sputtering, fluidization and stress introducing to the target materials. These effects work together to decrease and reshape the left materials, finally resulting in forming and stretching quasi-liquid bridges. Based on this mechanism, we have achieved parallel fabrication of multi nanostrings with diameter less than 10 nm by large-area FIB irradiation. We have also produced fusiform mass structure suspended with sub-10 nm links, and successfully rotated a suspended square in-plane. |
Persistent Identifier | http://hdl.handle.net/10722/286855 |
ISSN | 2023 SCImago Journal Rankings: 0.322 |
DC Field | Value | Language |
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dc.contributor.author | Li, C. | - |
dc.contributor.author | Ding, K. | - |
dc.contributor.author | Wu, W. G. | - |
dc.contributor.author | Xu, J. | - |
dc.date.accessioned | 2020-09-07T11:45:51Z | - |
dc.date.available | 2020-09-07T11:45:51Z | - |
dc.date.issued | 2011 | - |
dc.identifier.citation | Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS), 2011, p. 340-343 | - |
dc.identifier.issn | 1084-6999 | - |
dc.identifier.uri | http://hdl.handle.net/10722/286855 | - |
dc.description.abstract | This paper reports a novel method for nanofabrication utilizing the hybrid of energetic ion induced fluidization and stress. In the method, large-area irradiation of focused ion beam (FIB) on suspended film structures such as clamped-clamped cantilevers is adopted. The ion (such as Ga+) bombardment causes sputtering, fluidization and stress introducing to the target materials. These effects work together to decrease and reshape the left materials, finally resulting in forming and stretching quasi-liquid bridges. Based on this mechanism, we have achieved parallel fabrication of multi nanostrings with diameter less than 10 nm by large-area FIB irradiation. We have also produced fusiform mass structure suspended with sub-10 nm links, and successfully rotated a suspended square in-plane. | - |
dc.language | eng | - |
dc.relation.ispartof | Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS) | - |
dc.title | Ultra-fine nanofabrication by hybrid of energetic ion induced fluidization and stress | - |
dc.type | Conference_Paper | - |
dc.description.nature | link_to_subscribed_fulltext | - |
dc.identifier.doi | 10.1109/MEMSYS.2011.5734431 | - |
dc.identifier.scopus | eid_2-s2.0-79953799224 | - |
dc.identifier.spage | 340 | - |
dc.identifier.epage | 343 | - |
dc.identifier.issnl | 1084-6999 | - |