Browsing by Author Lai, K

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Showing results 1 to 16 of 16
TitleAuthor(s)Issue DateViews
 
2007
97
 
2012
122
 
2019
33
 
2019
10
 
2006
131
 
2006
215
 
2014
96
 
2010
106
 
2011
127
2012
96
 
Optimum mask and source patterns to print a given shape
Proceeding/Conference:Proceedings of SPIE
2001
114
 
Optimum mask and source patterns to print a given shape
Journal:Journal of Microlithography, Microfabrication, and Microsystems
2002
82
 
2012
53
 
2007
75
 
2016
34
 
2012
47