Browsing by Author Lai, K

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TitleAuthor(s)Issue Date
 
2007
 
2012
 
2019
 
2019
 
10-Aug-2023
 
2006
 
2006
 
2021
 
2014
 
2010
 
2011
2012
 
Optimum mask and source patterns to print a given shape
Journal:Journal of Microlithography, Microfabrication, and Microsystems
2002
 
Optimum mask and source patterns to print a given shape
Proceeding/Conference:Proceedings of SPIE
2001
 
2022
 
2020
 
2012
 
2007
 
2019
 
2016