Browsing by Author Lai, K

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TitleAuthor(s)Issue DateViews
 
2007
160
 
2012
169
 
2019
64
 
2019
18
 
2006
187
 
2006
162
 
2021
29
 
2014
57
 
2010
137
 
2011
154
2012
116
 
Optimum mask and source patterns to print a given shape
Journal:Journal of Microlithography, Microfabrication, and Microsystems
2002
121
 
Optimum mask and source patterns to print a given shape
Proceeding/Conference:Proceedings of SPIE
2001
113
 
2022
1
 
2020
32
 
2012
31
 
2007
49
 
2019
27
 
2016
56
 
2012
27