Browsing by Author Lai, K

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Showing results 1 to 19 of 19
TitleAuthor(s)Issue DateViews
 
2007
166
 
2012
190
 
2019
61
 
2019
17
 
2006
201
 
2006
186
 
2021
24
 
2014
69
 
2010
148
 
2011
171
2012
127
 
Optimum mask and source patterns to print a given shape
Proceeding/Conference:Proceedings of SPIE
2001
136
 
Optimum mask and source patterns to print a given shape
Journal:Journal of Microlithography, Microfabrication, and Microsystems
2002
128
 
2020
28
 
2012
36
 
2007
57
 
2019
24
 
2016
58
 
2012
32