Showing results 1 to 2 of 2
| Title | Author(s) | Issue Date | |
|---|---|---|---|
Actuation of polysilicon surface-micromachined mirrors Proceeding/Conference:Proceedings of SPIE - The International Society for Optical Engineering | 1996 | ||
Precision and performance of polysilicon micromirrors for hybrid integrated optics Proceeding/Conference:Proceedings of SPIE - The International Society for Optical Engineering | 1995 |