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Conference Paper: Actuation of polysilicon surface-micromachined mirrors

TitleActuation of polysilicon surface-micromachined mirrors
Authors
Tien, Norman CKiang, MengHsiungDaneman, Michael JSolgaard, OlavLau, Kam YMuller, Richard S
Issue Date1996
PublisherS P I E - International Society for Optical Engineering. The Journal's web site is located at http://spie.org/x1848.xml
Citation
Proceedings Of Spie - The International Society For Optical Engineering, 1996, v. 2687, p. 53-59 How to Cite?
DOI: http://dx.doi.org/10.1117/12.234636
AbstractTwo types of polysilicon surface-micromachined actuators designed for moving hinged micromirrors are described. An electrostatic comb-drive actuator comprised of interdigitated capacitors has been used to move a mirror at frequencies of at least a kHz. Impact-actuated linear vibromotors allow mirrors to travel over large (> 100 μm) ranges with submicron positioning.
Persistent Identifierhttp://hdl.handle.net/10722/148991
ISSN
0277-786X
2023 SCImago Journal Rankings: 0.152

 

DC FieldValueLanguage
dc.contributor.authorTien, Norman Cen_HK
dc.contributor.authorKiang, MengHsiungen_HK
dc.contributor.authorDaneman, Michael Jen_HK
dc.contributor.authorSolgaard, Olaven_HK
dc.contributor.authorLau, Kam Yen_HK
dc.contributor.authorMuller, Richard Sen_HK
dc.date.accessioned2012-06-20T06:17:44Z-
dc.date.available2012-06-20T06:17:44Z-
dc.date.issued1996en_HK
dc.identifier.citationProceedings Of Spie - The International Society For Optical Engineering, 1996, v. 2687, p. 53-59en_US
dc.identifier.issn0277-786Xen_HK
dc.identifier.urihttp://hdl.handle.net/10722/148991-
dc.description.abstractTwo types of polysilicon surface-micromachined actuators designed for moving hinged micromirrors are described. An electrostatic comb-drive actuator comprised of interdigitated capacitors has been used to move a mirror at frequencies of at least a kHz. Impact-actuated linear vibromotors allow mirrors to travel over large (> 100 μm) ranges with submicron positioning.en_HK
dc.languageengen_US
dc.publisherS P I E - International Society for Optical Engineering. The Journal's web site is located at http://spie.org/x1848.xmlen_HK
dc.relation.ispartofProceedings of SPIE - The International Society for Optical Engineeringen_HK
dc.titleActuation of polysilicon surface-micromachined mirrorsen_HK
dc.typeConference_Paperen_HK
dc.identifier.emailTien, Norman C: nctien@hku.hken_HK
dc.identifier.authorityTien, Norman C=rp01604en_HK
dc.description.naturelink_to_subscribed_fulltexten_US
dc.identifier.doi10.1117/12.234636-
dc.identifier.scopuseid_2-s2.0-0029717163en_HK
dc.identifier.volume2687en_HK
dc.identifier.spage53en_HK
dc.identifier.epage59en_HK
dc.publisher.placeUnited Statesen_HK
dc.identifier.scopusauthoridTien, Norman C=7006532826en_HK
dc.identifier.scopusauthoridKiang, MengHsiung=7003422357en_HK
dc.identifier.scopusauthoridDaneman, Michael J=7003552202en_HK
dc.identifier.scopusauthoridSolgaard, Olav=7005609097en_HK
dc.identifier.scopusauthoridLau, Kam Y=7401559989en_HK
dc.identifier.scopusauthoridMuller, Richard S=7404245946en_HK
dc.identifier.issnl0277-786X-

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