Browsing by Author Lai, K

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Showing results 1 to 19 of 19
TitleAuthor(s)Issue DateViews
 
2007
97
 
2012
121
 
2019
2
 
2019
 
2006
102
 
2006
99
 
2014
56
 
2010
107
 
2011
107
2012
39
 
Optimum mask and source patterns to print a given shape
Proceeding/Conference:Proceedings of SPIE
2001
119
 
Optimum mask and source patterns to print a given shape
Journal:Journal of Microlithography, Microfabrication, and Microsystems
2002
60
 
2020
 
2012
41
 
2007
67
 
2020
 
2019
3
 
2016
10
 
2012
36