Browsing by Author Lai, K

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Showing results 1 to 16 of 16
TitleAuthor(s)Issue DateViews
 
2007
88
 
2012
109
 
2019
15
 
2019
3
 
2006
123
 
2006
211
 
2014
89
 
2010
96
 
2011
120
2012
79
 
Optimum mask and source patterns to print a given shape
Proceeding/Conference:Proceedings of SPIE
2001
105
 
Optimum mask and source patterns to print a given shape
Journal:Journal of Microlithography, Microfabrication, and Microsystems
2002
72
 
2012
48
 
2007
68
 
2016
29
 
2012
43