Results 1 to 4 of 4
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TypeTitleAuthor(s)YearViews
Special modulator for high frequency, low-voltage plasma immersion ion implantation
Publisher:
American Institute of Physics. The Journal's web site is located at http://ojps.aip.org/rsio/
Tian, X; Wang, X; Tang, B; Chu, PK; Ko, PK; Cheng, YC1999450
 
A novel distributed system for plasma immersion ion implanter control and automation
Publisher:
American Institute of Physics. The Journal's web site is located at http://ojps.aip.org/rsio/
Liu, AG; Wang, XF; Tang, BY; Chu, PK; Ko, PK; Cheng, YC1998536
 
Principles and characteristics of a new generation plasma immersion ion implanter
Publisher:
American Institute of Physics. The Journal's web site is located at http://ojps.aip.org/rsio/
Chu, PK; Tang, BY; Cheng, YC; Ko, PK1997478
 
Off-state leakage currents in n-channel metal-oxide-semiconductor field-effect transistors with 10-nm thermally nitrided and reoxidized nitrided oxides as the gate dielectric
Journal:
Applied Physics Letters
Publisher:
American Institute of Physics. The Journal's web site is located at http://apl.aip.org/
Fleischer, S; Liu, ZH; Lai, PT; Ko, PK; Cheng, YC1991123
 
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