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Title | Author(s) | Issue Date | Views | |
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Linear microvibromotor for positioning optical components Journal:Journal of Microelectromechanical Systems | 1996 | 148 |
Title | Author(s) | Issue Date | Views | |
---|---|---|---|---|
Linear microvibromotor for positioning optical components Journal:Journal of Microelectromechanical Systems | 1996 | 148 |