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- Publisher Website: 10.1109/Transducers.2013.6626731
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Conference Paper: Multilayer passive RF microfabrication using jet-printed Au nanoparticle ink and aerosol-deposited dielectric
Title | Multilayer passive RF microfabrication using jet-printed Au nanoparticle ink and aerosol-deposited dielectric |
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Authors | |
Keywords | Additive microfabrication Inkjet printing Gold nanoparticles Printed resonator |
Issue Date | 2013 |
Publisher | IEEE. The Journal's web site is located at http://ieeexplore.ieee.org/xpl/conhome.jsp?punumber=1000712 |
Citation | The 17th International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers & Eurosensors XXVII), Barcelona. Spain, 16-20 June 2013.In Conference Proceedings, 2013, p. 178-181, no. M3P.042 How to Cite? |
Abstract | We report a bi-material additive microfabrication technique combining inkjet-printed gold films and an aerosol-deposited dielectric enamel for the realization of multilayer microsystems. Hexanethiol-encapsulated gold nanoparticle ink enables metal deposition at atmospheric pressure with a maximum temperature of 200°C. Dielectric patterning is achieved via shadow mask. Process utility is demonstrated for passive radio frequency components through the realization of spiral inductors and resonant parallel L-C tanks. The resulting device parameters agree well with theory, and the resonators exhibited a Q of 60 at 596MHz, the highest quality factor of an as-printed ink-jet microfabricated gold resonant structure to date. © 2013 IEEE. |
Persistent Identifier | http://hdl.handle.net/10722/189860 |
ISBN |
DC Field | Value | Language |
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dc.contributor.author | Roberts, RC | en_US |
dc.contributor.author | Tien, NC | en_US |
dc.date.accessioned | 2013-09-17T15:00:58Z | - |
dc.date.available | 2013-09-17T15:00:58Z | - |
dc.date.issued | 2013 | en_US |
dc.identifier.citation | The 17th International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers & Eurosensors XXVII), Barcelona. Spain, 16-20 June 2013.In Conference Proceedings, 2013, p. 178-181, no. M3P.042 | en_US |
dc.identifier.isbn | 978-1-4673-5983-2 | - |
dc.identifier.uri | http://hdl.handle.net/10722/189860 | - |
dc.description.abstract | We report a bi-material additive microfabrication technique combining inkjet-printed gold films and an aerosol-deposited dielectric enamel for the realization of multilayer microsystems. Hexanethiol-encapsulated gold nanoparticle ink enables metal deposition at atmospheric pressure with a maximum temperature of 200°C. Dielectric patterning is achieved via shadow mask. Process utility is demonstrated for passive radio frequency components through the realization of spiral inductors and resonant parallel L-C tanks. The resulting device parameters agree well with theory, and the resonators exhibited a Q of 60 at 596MHz, the highest quality factor of an as-printed ink-jet microfabricated gold resonant structure to date. © 2013 IEEE. | - |
dc.language | eng | en_US |
dc.publisher | IEEE. The Journal's web site is located at http://ieeexplore.ieee.org/xpl/conhome.jsp?punumber=1000712 | - |
dc.relation.ispartof | International Conference on Solid State Sensors and Actuators Proceedings | en_US |
dc.subject | Additive microfabrication | - |
dc.subject | Inkjet printing | - |
dc.subject | Gold nanoparticles | - |
dc.subject | Printed resonator | - |
dc.title | Multilayer passive RF microfabrication using jet-printed Au nanoparticle ink and aerosol-deposited dielectric | en_US |
dc.type | Conference_Paper | en_US |
dc.identifier.email | Roberts, RC: rcr8@hku.hk | en_US |
dc.identifier.email | Tien, NC: nctien@hku.hk | en_US |
dc.identifier.authority | Roberts, RC=rp01738 | en_US |
dc.identifier.authority | Tien, NC=rp01604 | en_US |
dc.description.nature | link_to_subscribed_fulltext | - |
dc.identifier.doi | 10.1109/Transducers.2013.6626731 | - |
dc.identifier.scopus | eid_2-s2.0-84891705873 | - |
dc.identifier.hkuros | 222877 | en_US |
dc.identifier.hkuros | 239536 | - |
dc.identifier.spage | 178 | en_US |
dc.identifier.epage | 181 | en_US |
dc.publisher.place | United States | - |
dc.customcontrol.immutable | sml 131023 | - |