Showing results 1 to 2 of 2
| Title | Author(s) | Issue Date | |
|---|---|---|---|
Electrostatically driven touch-mode poly-SiC micro speaker Proceeding/Conference:Proceedings of IEEE Sensors | 2007 | ||
Silicon carbide (SiC) membrane nanomechanical resonators with multiple vibrational modes Proceeding/Conference:2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11 | 2011 |