Showing results 1 to 2 of 2
| Title | Author(s) | Issue Date | |
|---|---|---|---|
Linear microvibromotor for positioning optical components Journal:Journal of Microelectromechanical Systems | 1996 | ||
Linear microvibromotor for positioning optical components Proceeding/Conference:Proceedings of the IEEE Micro Electro Mechanical Systems | 1995 |
