Browsing by Author Daneman, Michael J

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TitleAuthor(s)Issue Date
 
Actuation of polysilicon surface-micromachined mirrors
Proceeding/Conference:Proceedings of SPIE - The International Society for Optical Engineering
Tien, Norman CKiang, MengHsiungDaneman, Michael JSolgaard, OlavLau, Kam YMuller, Richard S
1996
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