Showing results 1 to 4 of 4
| Title | Author(s) | Issue Date | |
|---|---|---|---|
Laser-to-fiber coupling module using a micromachined alignment mirror Journal:IEEE Photonics Technology Letters | 1996 | ||
Linear microvibromotor for positioning optical components Journal:Journal of Microelectromechanical Systems | 1996 | ||
Linear microvibromotor for positioning optical components Proceeding/Conference:Proceedings of the IEEE Micro Electro Mechanical Systems | 1995 | ||
Surface-micromachined mirrors for laser-beam positioning Journal:Sensors and Actuators, A: Physical | 1996 |