Browsing by Author Muller, RS

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Showing results 1 to 6 of 6
TitleAuthor(s)Issue DateViews
 
1996
82
 
Linear microvibromotor for positioning optical components
Journal:Journal of Microelectromechanical Systems
1996
56
Linear microvibromotor for positioning optical components
Proceeding/Conference:Proceedings of the IEEE Micro Electro Mechanical Systems
1995
54
 
1995
67
 
Surface-micromachined mirrors for laser-beam positioning
Journal:Sensors and Actuators, A: Physical
1996
70
Surface-micromachined mirrors for laser-beam positioning
Proceeding/Conference:International Conference on Solid-State Sensors and Actuators, and Eurosensors IX, Proceedings
1995
61