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Title | Author(s) | Issue Date | |
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Actuation of polysilicon surface-micromachined mirrors Proceeding/Conference:Proceedings of SPIE - The International Society for Optical Engineering | 1996 |
Title | Author(s) | Issue Date | |
---|---|---|---|
Actuation of polysilicon surface-micromachined mirrors Proceeding/Conference:Proceedings of SPIE - The International Society for Optical Engineering | 1996 |