Showing results 1 to 3 of 3
| Title | Author(s) | Issue Date | |
|---|---|---|---|
Biomimetic direction-sensitive micromachined diaphragm for ultrasonic transducers Proceeding/Conference:Proceedings of the IEEE Ultrasonics Symposium | 2001 | ||
Fabrication of biomimetic 3-D structured diaphragms Proceeding/Conference:Sensors and Actuators, A: Physical | 2002 | ||
Fabrication of thick silicon dioxide sacrificial and isolation blocks in a silicon substrate Journal:Journal of Micromechanics and Microengineering | 2002 |