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Conference Paper: Fabrication of biomimetic 3-D structured diaphragms

TitleFabrication of biomimetic 3-D structured diaphragms
Authors
Keywords3-D structured diaphragms
Biomimetic devices
Directional sensitivity
Silicon oxide blocks
Issue Date2002
PublisherElsevier SA. The Journal's web site is located at http://www.elsevier.com/locate/sna
Citation
Sensors And Actuators, A: Physical, 2002, v. 97-98, p. 448-456 How to Cite?
AbstractWe report on a new approach to the fabrication of 3-D structured diaphragms using integrated surface and deep reactive ion etching (DRIE) bulk silicon micromachining on a silicon-on-insulator (SOI) wafer. Polysilicon diaphragms of 1 mm × 2 mm × 1.2 μm, and 1 mm × 2 mm × 2.4 μm parylene diaphragms, which are designed for a biomimetic directional microphone and a differential microphone, respectively have been successfully fabricated by our method. The membranes have 20 μm-thick silicon proof masses, solid stiffeners, hollow stiffeners, and 20 μm-deep corrugations to mimic the tympanal membranes of the fly's ears. Acoustic measurements of the diaphragm using laser vibrometry have demonstrated high directional sensitivity of the device.
Persistent Identifierhttp://hdl.handle.net/10722/149000
ISSN
2015 Impact Factor: 2.201
2015 SCImago Journal Rankings: 0.902
ISI Accession Number ID
References

 

DC FieldValueLanguage
dc.contributor.authorYoo, Ken_HK
dc.contributor.authorGibbons, Cen_HK
dc.contributor.authorSu, QTen_HK
dc.contributor.authorMiles, RNen_HK
dc.contributor.authorTien, NCen_HK
dc.date.accessioned2012-06-20T06:17:47Z-
dc.date.available2012-06-20T06:17:47Z-
dc.date.issued2002en_HK
dc.identifier.citationSensors And Actuators, A: Physical, 2002, v. 97-98, p. 448-456en_US
dc.identifier.issn0924-4247en_HK
dc.identifier.urihttp://hdl.handle.net/10722/149000-
dc.description.abstractWe report on a new approach to the fabrication of 3-D structured diaphragms using integrated surface and deep reactive ion etching (DRIE) bulk silicon micromachining on a silicon-on-insulator (SOI) wafer. Polysilicon diaphragms of 1 mm × 2 mm × 1.2 μm, and 1 mm × 2 mm × 2.4 μm parylene diaphragms, which are designed for a biomimetic directional microphone and a differential microphone, respectively have been successfully fabricated by our method. The membranes have 20 μm-thick silicon proof masses, solid stiffeners, hollow stiffeners, and 20 μm-deep corrugations to mimic the tympanal membranes of the fly's ears. Acoustic measurements of the diaphragm using laser vibrometry have demonstrated high directional sensitivity of the device.en_HK
dc.languageengen_US
dc.publisherElsevier SA. The Journal's web site is located at http://www.elsevier.com/locate/snaen_HK
dc.relation.ispartofSensors and Actuators, A: Physicalen_HK
dc.subject3-D structured diaphragmsen_HK
dc.subjectBiomimetic devicesen_HK
dc.subjectDirectional sensitivityen_HK
dc.subjectSilicon oxide blocksen_HK
dc.titleFabrication of biomimetic 3-D structured diaphragmsen_HK
dc.typeConference_Paperen_HK
dc.identifier.emailTien, NC: nctien@hku.hken_HK
dc.identifier.authorityTien, NC=rp01604en_HK
dc.description.naturelink_to_subscribed_fulltexten_US
dc.identifier.doi10.1016/S0924-4247(01)00808-1en_HK
dc.identifier.scopuseid_2-s2.0-0036544028en_HK
dc.relation.referenceshttp://www.scopus.com/mlt/select.url?eid=2-s2.0-0036544028&selection=ref&src=s&origin=recordpageen_HK
dc.identifier.volume97-98en_HK
dc.identifier.spage448en_HK
dc.identifier.epage456en_HK
dc.identifier.isiWOS:000176297000062-
dc.publisher.placeSwitzerlanden_HK
dc.identifier.scopusauthoridYoo, K=7202592782en_HK
dc.identifier.scopusauthoridGibbons, C=7007091359en_HK
dc.identifier.scopusauthoridSu, QT=7201716143en_HK
dc.identifier.scopusauthoridMiles, RN=7201460593en_HK
dc.identifier.scopusauthoridTien, NC=7006532826en_HK

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