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Conference Paper: Biomimetic direction-sensitive micromachined diaphragm for ultrasonic transducers

TitleBiomimetic direction-sensitive micromachined diaphragm for ultrasonic transducers
Authors
Issue Date2001
Citation
Proceedings Of The Ieee Ultrasonics Symposium, 2001, v. 2, p. 887-890 How to Cite?
AbstractThis paper presents a novel biomimetic direction-sensitive micromachined diaphragm for ultrasonic transducers. The diaphragm design is based on the mechanical model of the parasitoid fly, Ormia ochracea's ears which achieve directionality through mechanical coupling of the tympana's resonant mode shapes. Micromachining technology has been utilized to fabricate the 3D structured biomimetic diaphragm. It has two 60×120×20 μm3 single crystal silicon (SCS) proof masses and solid stiffeners attached to a 0.8-μm-thick silicon nitride diaphragm to create the main resonant mode shapes like the fly's ears. Acoustic measurements of the diaphragm using laser vibrometry have demonstrated high directional sensitivity of the device.
Persistent Identifierhttp://hdl.handle.net/10722/148997
ISSN
References

 

DC FieldValueLanguage
dc.contributor.authorYoo, Ken_HK
dc.contributor.authorSu, Qen_HK
dc.contributor.authorMiles, RNen_HK
dc.contributor.authorTien, NCen_HK
dc.date.accessioned2012-06-20T06:17:45Z-
dc.date.available2012-06-20T06:17:45Z-
dc.date.issued2001en_HK
dc.identifier.citationProceedings Of The Ieee Ultrasonics Symposium, 2001, v. 2, p. 887-890en_US
dc.identifier.issn1051-0117en_HK
dc.identifier.urihttp://hdl.handle.net/10722/148997-
dc.description.abstractThis paper presents a novel biomimetic direction-sensitive micromachined diaphragm for ultrasonic transducers. The diaphragm design is based on the mechanical model of the parasitoid fly, Ormia ochracea's ears which achieve directionality through mechanical coupling of the tympana's resonant mode shapes. Micromachining technology has been utilized to fabricate the 3D structured biomimetic diaphragm. It has two 60×120×20 μm3 single crystal silicon (SCS) proof masses and solid stiffeners attached to a 0.8-μm-thick silicon nitride diaphragm to create the main resonant mode shapes like the fly's ears. Acoustic measurements of the diaphragm using laser vibrometry have demonstrated high directional sensitivity of the device.en_HK
dc.languageengen_US
dc.relation.ispartofProceedings of the IEEE Ultrasonics Symposiumen_HK
dc.titleBiomimetic direction-sensitive micromachined diaphragm for ultrasonic transducersen_HK
dc.typeConference_Paperen_HK
dc.identifier.emailTien, NC: nctien@hku.hken_HK
dc.identifier.authorityTien, NC=rp01604en_HK
dc.description.naturelink_to_subscribed_fulltexten_US
dc.identifier.scopuseid_2-s2.0-0035731188en_HK
dc.relation.referenceshttp://www.scopus.com/mlt/select.url?eid=2-s2.0-0035731188&selection=ref&src=s&origin=recordpageen_HK
dc.identifier.volume2en_HK
dc.identifier.spage887en_HK
dc.identifier.epage890en_HK
dc.publisher.placeUnited Statesen_HK
dc.identifier.scopusauthoridYoo, K=7202592782en_HK
dc.identifier.scopusauthoridSu, Q=7201716143en_HK
dc.identifier.scopusauthoridMiles, RN=7201460593en_HK
dc.identifier.scopusauthoridTien, NC=7006532826en_HK

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