Showing results 15 to 21 of 21
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| Title | Author(s) | Issue Date | Views | |
|---|---|---|---|---|
Placement sensitivity to aberration in optical imaging Proceeding/Conference:IEEE Conference on Electron Devices and Solid-State Circuits | 2003 | 121 | ||
Quantification of image quality Proceeding/Conference:SPIE - International Society for Optical Engineering. Proceedings | 2002 | 118 | ||
Sensitivity of 1D mask features towards aberration in photolithography Proceeding/Conference:Regional Inter-University Postgraduate Electrical and Electronic Engineering Conference | 2003 | 190 | ||
Standard cell layout with grid-placed contacts Proceeding/Conference:Regional Inter-University Postgraduate Electrical and Electronic Engineering Conference | 2003 | 105 | ||
| 2002 | 94 | |||
Theoretical discussion on reduced aberration sensitivity of enhanced alternating phase-shifting masks Proceeding/Conference:Proceedings of SPIE | 2002 | 101 | ||
| 2001 | 99 |