Browsing by Author Lai, K

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Showing results 9 to 19 of 19 < previous 
TitleAuthor(s)Issue DateViews
 
2011
175
2012
132
 
Optimum mask and source patterns to print a given shape
Proceeding/Conference:Proceedings of SPIE
2001
142
 
Optimum mask and source patterns to print a given shape
Journal:Journal of Microlithography, Microfabrication, and Microsystems
2002
125
 
2020
12
 
2012
53
 
2007
69
 
2020
10
 
2019
17
 
2016
46
 
2012
43