Browsing by Author Lai, K

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Showing results 11 to 21 of 21 < previous 
TitleAuthor(s)Issue DateViews
 
2011
172
2012
128
 
Optimum mask and source patterns to print a given shape
Journal:Journal of Microlithography, Microfabrication, and Microsystems
2002
130
 
Optimum mask and source patterns to print a given shape
Proceeding/Conference:Proceedings of SPIE
2001
 
2022
 
2020
32
 
2012
36
 
2007
57
 
2019
27
 
2016
61
 
2012
35