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Conference Paper: Inverse synthesis of phase-shifting mask for optical lithography

TitleInverse synthesis of phase-shifting mask for optical lithography
Authors
Chan, SHWong, ALam, EYM
Issue Date2007
Citation
Adaptive Optics: Analysis and Methods/Computational Optical Sensing and Imaging/Information Photonics/Signal Recovery and Synthesis Topical Meetings, Vancouver, Canada, 18 June 2007 How to Cite?
DOI: http://dx.doi.org/10.1364/SRS.2007.SMD3
Persistent Identifierhttp://hdl.handle.net/10722/99716

 

DC FieldValueLanguage
dc.contributor.authorChan, SHen_HK
dc.contributor.authorWong, Aen_HK
dc.contributor.authorLam, EYMen_HK
dc.date.accessioned2010-09-25T18:41:27Z-
dc.date.available2010-09-25T18:41:27Z-
dc.date.issued2007en_HK
dc.identifier.citationAdaptive Optics: Analysis and Methods/Computational Optical Sensing and Imaging/Information Photonics/Signal Recovery and Synthesis Topical Meetings, Vancouver, Canada, 18 June 2007-
dc.identifier.urihttp://hdl.handle.net/10722/99716-
dc.languageengen_HK
dc.relation.ispartofProceedings Adaptive Optics: Analysis and Methods/Computational Optical Sensing and Imaging/Information Photonics/Signal Recovery and Synthesis Topical Meetingsen_HK
dc.titleInverse synthesis of phase-shifting mask for optical lithographyen_HK
dc.typeConference_Paperen_HK
dc.identifier.emailLam, EYM: elam@eee.hku.hken_HK
dc.identifier.authorityLam, EYM=rp00131en_HK
dc.description.naturelink_to_subscribed_fulltext-
dc.identifier.doi10.1364/SRS.2007.SMD3-
dc.identifier.scopuseid_2-s2.0-85087603263-
dc.identifier.hkuros128189en_HK

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